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	Variation of microstructure and composition of the cr2alc coating prepared by sputtering at 370 and 500 degrees c
	Li, J. J.1,2; Hu, L. F.1,2; Li, F. Z.1,2; Li, M. S.1; Zhou, Y. C.1
刊名	Surface & coatings technology
	2010-08-25
卷号	204期号:23页码:3838-3845
关键词	Cr2alc coating Max phase Magnetron sputtering Microstructure Substrate temperature Alpha-(cr,al)(2)o-3
ISSN号	0257-8972
DOI	10.1016/j.surfcoat.2010.04.067
通讯作者	Li, m. s.(mshli@imr.ac.cn)
英文摘要	Cr2alc coating was deposited at 370 and 500 degrees c by d.c. magnetron sputtering from an as-synthesized bulk cr2alc target. the phase composition and preferential orientation of the coating were investigated using xrd, and the microstructure of the coating was characterized by tem. results indicated that cr2alc coating with a strong (110) preferential orientation could be obtained. the coating microstructure was clearly affected by the deposition temperature. at 370 degrees c, the deposited coating possessed a triple-layered structure with an alpha-(cr, al)(2)o-3 inner layer, an amorphous intermediate layer and a crystalline cr2alc outer layer. however, the coating deposited at 500 degrees c had a single-layered structure consisting of crystalline cr2alc layer. the growth mechanism of the cr2alc coating at different deposition temperatures is discussed. (c) 2010 elsevier b.v. all rights reserved.
WOS关键词	PHASE THIN-FILMS ; AB-INITIO CALCULATIONS ; SELECT MAX PHASES ; TRIBOLOGICAL BEHAVIOR ; M(N+1)AX(N) PHASES ; DEPOSITED CHROMIUM ; OXIDATION BEHAVIOR ; VAPOR DEPOSITS ; NITRIDE FILMS ; BULK CR2ALC
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Coatings & Films ; Physics, Applied
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000280048600012
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2413705
专题	中国科学院大学
通讯作者	Li, M. S.
作者单位	1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Li, J. J.,Hu, L. F.,Li, F. Z.,et al. Variation of microstructure and composition of the cr2alc coating prepared by sputtering at 370 and 500 degrees c[J]. Surface & coatings technology,2010,204(23):3838-3845.
APA	Li, J. J.,Hu, L. F.,Li, F. Z.,Li, M. S.,&Zhou, Y. C..(2010).Variation of microstructure and composition of the cr2alc coating prepared by sputtering at 370 and 500 degrees c.Surface & coatings technology,204(23),3838-3845.
MLA	Li, J. J.,et al."Variation of microstructure and composition of the cr2alc coating prepared by sputtering at 370 and 500 degrees c".Surface & coatings technology 204.23(2010):3838-3845.

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