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	A novel micro electric field sensor with x-y dual axis sensitive differential structure
	Wang, Yu1,2; Fang, Dongming1; Feng, Ke1,2; Ren, Ren1,2; Chen, Bo1; Peng, Chunrong1; Xia, Shanhong1
刊名	Sensors and actuators a-physical
	2015-06-15
卷号	229页码:1-7
关键词	Electric field sensor Rotary actuator Mems Micro sensor
ISSN号	0924-4247
DOI	10.1016/j.sna.2015.03.013
通讯作者	Xia, shanhong(shxia@mail.ie.ac.cn)
英文摘要	This paper presents a novel x-y dual axis sensitive sensor for static electric field measurement. compared with the existent electric field micro sensors, which can only detect one axial direction electric field, this sensor is capable of two-dimensional electric field sensing. in the design of the micro sensor, the combination of angular comb-drives and serpentine springs can bring the advantage of achieving large in-plane rotation, which enlarges the vibration amplitudes and results in more induced charges. moreover, the push-pull electrostatic actuation method and the adopted differential sensing electrodes both can reduce the impact of common mode interference. two pairs of sensing elements are located differentially to form a cross-like shape, with each pair to get x and y component of the electric field respectively. experimental results agree well with the electric field calibration theory and show high measurement accuracy. in the range from 0 to 25 kv/m, the errors of electric field value are better than 8%. (c) 2015 elsevier b.v. all rights reserved.
WOS关键词	DESIGN
WOS研究方向	Engineering ; Instruments & Instrumentation
WOS类目	Engineering, Electrical & Electronic ; Instruments & Instrumentation
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000355883700001
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2376745
专题	中国科学院大学
通讯作者	Xia, Shanhong
作者单位	1.Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Wang, Yu,Fang, Dongming,Feng, Ke,et al. A novel micro electric field sensor with x-y dual axis sensitive differential structure[J]. Sensors and actuators a-physical,2015,229:1-7.
APA	Wang, Yu.,Fang, Dongming.,Feng, Ke.,Ren, Ren.,Chen, Bo.,...&Xia, Shanhong.(2015).A novel micro electric field sensor with x-y dual axis sensitive differential structure.Sensors and actuators a-physical,229,1-7.
MLA	Wang, Yu,et al."A novel micro electric field sensor with x-y dual axis sensitive differential structure".Sensors and actuators a-physical 229(2015):1-7.

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