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	Application of Biocompatible Organic/Inorganic Composite Film in Implantable Retinal Prosthesis
	Yang,Chunlei; Wu,Tianzhun; Feng,Ye; Zhao,Saisai
	2018
会议日期	2018
会议地点	中国深圳
英文摘要	Although many groups worldwide have spent a lot of effort on developing devices for retinal prosthesis to restore blind eyesight, current technologies still lack of a reliable implantable packaging solution for high-density feedthroughs.Here, we propose the fabrication and latest testing results for a novel five-layer organic/inorganic film package sample, the organic parylene-C (PA) was deposited using chemical vapor deposition (CVD) and the inorganic aluminum oxide (Al2O3) film was deposited using atomic layer deposition (ALD) method. The final sample has passed through the He leakage,bio-compatible level test and the active soaking test, indicated its life time last for years.
内容类型	会议论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/14522]
专题	深圳先进技术研究院_医工所
推荐引用方式 GB/T 7714	Yang,Chunlei,Wu,Tianzhun,Feng,Ye,et al. Application of Biocompatible Organic/Inorganic Composite Film in Implantable Retinal Prosthesis[C]. 见:. 中国深圳. 2018.

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