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	Design of a Vacuum-assisted soft UV-imprint system for micro-nano structures patterning on nonplanar surfaces
	Yaoxin Chen; Cui Ma; Ming Yu; Jiamin Yu; Hui Lin
	2018
会议日期	2018
会议地点	Wuyi Mountain, Fujian, China
英文摘要	Fabricating micro-nano structures on nonplanar substrates is technically challenging and high cost via conventional processes. In this paper, we present a new soft UVimprint method, along with a custom designed vacuum-assisted soft UV-imprint system that allows precise control of imprint pressure, cure time and so on. The proposed method provides a highly efficient and low-cost way to fabricate high-resolution patterning micro-nano structures on nonplanar substrates. To verify the method, we fabricated a 1600 nm pitch blazed grating on a concave substrate. First, a flexible soft mold, i.e. PDMS, is copied from a commercial planar blazed grating. Second, the soft PDMS mold is imprinted to a concave substrate through our soft UV-imprint system and the blazed grating profile is transferred to the concave substrate. Finally, the surface profile of the concave grating is tested, demonstrating that the capacity of our system to fabricate microstructures on nonplanar substrates
内容类型	会议论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/13757]
专题	深圳先进技术研究院_集成所
推荐引用方式 GB/T 7714	Yaoxin Chen,Cui Ma,Ming Yu,et al. Design of a Vacuum-assisted soft UV-imprint system for micro-nano structures patterning on nonplanar surfaces[C]. 见:. Wuyi Mountain, Fujian, China. 2018.

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