Design and implementation of FA networking control software that accords with SEMI standards

	Design and implementation of FA networking control software that accords with SEMI standards
	Liu MZ(刘明哲); Wang CX(王晨曦); Xu AD(徐皑冬); Jin N(金妮)
	2018
会议日期	November 2-4, 2018
会议地点	Qingdao, China
关键词	IC equipment SEMI FA
页码	117-120
英文摘要	As the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards.
产权排序	1
会议录	ICCIP 2018 - Proceedings of 2018 4th International Conference on Communication and Information Processing
会议录出版者	ACM
会议录出版地	New York
语种	英语
ISBN号	978-1-4503-6534-5
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/24390]
专题	沈阳自动化研究所_工业控制网络与系统研究室
通讯作者	Jin N(金妮)
作者单位	Key Laboratory of Networked Control Systems, Chinese Academy of Sciences, Shenyang Institute of Automation, China
推荐引用方式 GB/T 7714	Liu MZ,Wang CX,Xu AD,et al. Design and implementation of FA networking control software that accords with SEMI standards[C]. 见:. Qingdao, China. November 2-4, 2018.