Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy

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	Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy
	Qi LF(齐立峰)1,4,5 ; Sun LX(孙兰香)1,4,5 ; Wang W(汪为)1,2,4,5 ; Tian, XY(田雪咏)3; Zhang P(张鹏)1,2,4,5 ; Zheng, LM(郑黎明)1,4,5
刊名	Chinese Journal of Analytical Chemistry
	2018
卷号	46 期号:10 页码:1518-1527
关键词	Laser-induced Breakdown Spectroscopy Microanalysis Ablation Crater Segregation Review
ISSN号	0253-3820
产权排序	1
英文摘要	The technique of micro-laser-induced breakdown spectroscopy (μLIBS) usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to conventional laser-induced breakdown spectroscopy (LIBS), it can provide more abundant form, structure, and content information on a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of μLIBS in the selection of laser source and the structure of optical path system is introduced, and its application in metal, semiconductor, animal and plant fields is reviewed. The existing problems and potential development direction is pointed out.
资助项目	National Key Research and Development Program of China[2017YFF0106202] ; National Natural Science Foundation of China[61473279] ; Key Research Program of Frontier Sciences, Chinese Academy of Sciences[QYZDJ-SSW-JSC037] ; Youth Innovation Promotion Association, Chinese Academy of Sciences
WOS关键词	TRACE ELEMENTAL ANALYSES ; QUANTITATIVE-ANALYSIS ; MATTER INTERACTION ; STEEL SAMPLE ; MU-LIBS ; PLASMA ; SPECTROMETRY ; ENERGY ; MICROANALYSIS ; ABLATION
WOS研究方向	Chemistry
语种	英语
WOS记录号	WOS:000451326500003
资助机构	National Key Research and Development Program of China ; National Natural Science Foundation of China ; Key Research Program of Frontier Sciences, Chinese Academy of Sciences ; Youth Innovation Promotion Association, Chinese Academy of Sciences
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/23418]
专题	沈阳自动化研究所_工业控制网络与系统研究室
通讯作者	Sun LX(孙兰香)
作者单位	1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 2.University of Chinese Academy of Sciences, Beijing 100049, China 3.Central Research Institute, SIASUN Robot and Automation Co. Ltd, Shenyang 110168, China 4.Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, China 5.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China
推荐引用方式 GB/T 7714	Qi LF,Sun LX,Wang W,et al. Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy[J]. Chinese Journal of Analytical Chemistry,2018,46(10):1518-1527.
APA	Qi LF,Sun LX,Wang W,Tian, XY,Zhang P,&Zheng, LM.(2018).Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy.Chinese Journal of Analytical Chemistry,46(10),1518-1527.
MLA	Qi LF,et al."Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy".Chinese Journal of Analytical Chemistry 46.10(2018):1518-1527.