QQ客服 官方微博 反馈留言

	SUB-FIN SOLID SOURCE DOPING IN THE 14NM AND SUB-14 FINFET DEVICE
	Yan, Wen[1]; Zhou, Fei[2]; Wei, Chengqing[3]; Zhao, Hai[4]; Xu, CanYang[5]; Li, Yong[6]; Ju, Jianhua[7]; Yang, Weiguang[8]
	2016
会议名称	China Semiconductor Technology International Conference (CSTIC)
会议日期	2016-01-01
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2230261
专题	上海大学
作者单位	1.[1]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 2.Shanghai Univ, Sch Mat Sci & Engn, Shanghai, Peoples R China. 3.[2]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 4.[3]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 5.[4]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 6.[5]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 7.[6]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 8.[7]SMIC, Log Technol & Dev Ctr, Shanghai, Peoples R China. 9.[8]Shanghai Univ, Sch Mat Sci & Engn, Shanghai, Peoples R China.
推荐引用方式 GB/T 7714	Yan, Wen[1],Zhou, Fei[2],Wei, Chengqing[3],et al. SUB-FIN SOLID SOURCE DOPING IN THE 14NM AND SUB-14 FINFET DEVICE[C]. 见:China Semiconductor Technology International Conference (CSTIC). 2016-01-01.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。