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	Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization
	Wang, Minchang[1]; Ge, Daohan[2]; Wang, Jingjie[3]; Qin, Song[4]; Jiao, Jiwei[5]
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2016
卷号	16页码:9930-9935
关键词	Nanopore Array Anodic Etching Focused Ion Beam Raster Scanning
ISSN号	1533-4880
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2229823
专题	上海大学
作者单位	1.[1]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China. 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China. 3.[2]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China. 4.[3]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China. 5.Shanghai Univ, Dept Chem, Coll Sci, Shanghai 200444, Peoples R China. 6.[4]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China. 7.Univ Chinese Acad Sci, Beijing 100049, Peoples R China. 8.[5]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China.
推荐引用方式 GB/T 7714	Wang, Minchang[1],Ge, Daohan[2],Wang, Jingjie[3],et al. Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16:9930-9935.
APA	Wang, Minchang[1],Ge, Daohan[2],Wang, Jingjie[3],Qin, Song[4],&Jiao, Jiwei[5].(2016).Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,16,9930-9935.
MLA	Wang, Minchang[1],et al."Fast Formation of Silicon Nanopore Array by Low-Dose Focused Ion Beam Raster Scanning Guided Anodization".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16(2016):9930-9935.

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