Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录) | |
Hu, Guo-Qing[1]; Gong, Xiao-Shan[1]; Zhou, Yong-Hong[2]; Zou, Chong[2]; Alam, Jahangir[1] | |
刊名 | Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science) |
2015 | |
卷号 | 43页码:1-8 |
关键词 | Deformation Pressure sensors Silicon Silicon sensors Stresses Structural optimization Substrates |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2210930 |
专题 | 华南理工大学 |
作者单位 | 1.[1] School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 2.Guangdong, China 3.[2] Fujian Wide Plus Precision Instruments Co. Ltd., Fuzhou 4.Fujian, China |
推荐引用方式 GB/T 7714 | Hu, Guo-Qing[1],Gong, Xiao-Shan[1],Zhou, Yong-Hong[2],等. Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录)[J]. Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science),2015,43:1-8. |
APA | Hu, Guo-Qing[1],Gong, Xiao-Shan[1],Zhou, Yong-Hong[2],Zou, Chong[2],&Alam, Jahangir[1].(2015).Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录).Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science),43,1-8. |
MLA | Hu, Guo-Qing[1],et al."Output performance of silicon pressure sensor influenced by deformation of sensor substrate (EI收录)".Huanan Ligong Daxue Xuebao/Journal of South China University of Technology (Natural Science) 43(2015):1-8. |
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