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	An integrated micro-chip with Ru/Al2O3/ZnO as sensing material for SO2 detection
	Liu, Yingying[1]; Xu, Xinyue[2]; Chen, Ying[3]; Zhang, Yuan[4]; Gao, Xinghua[5]; Xu, Pengcheng[6]; Li, Xinxin[7]; Fang, Jianhui[8]; Wen, Weijia[9]
刊名	SENSORS AND ACTUATORS B-CHEMICAL
	2018
卷号	262页码:26-34
关键词	ZnO SO2 Gas sensors On-line mass spectrometry MEMS sensor Sensing mechanism
ISSN号	0925-4005
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2179893
专题	上海大学
作者单位	1.[1]Shanghai Univ, Dept Chem, 99 Shangda Rd, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China. 3.[3]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China. 4.[4]Shanghai Univ, Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China. 5.[5]Shanghai Univ, Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China. 6.[6]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China. 7.[7]Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China. 8.[8]Shanghai Univ, Dept Chem, 99 Shangda Rd, Shanghai 200444, Peoples R China. 9.[9]Shanghai Univ, Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Liu, Yingying[1],Xu, Xinyue[2],Chen, Ying[3],et al. An integrated micro-chip with Ru/Al2O3/ZnO as sensing material for SO2 detection[J]. SENSORS AND ACTUATORS B-CHEMICAL,2018,262:26-34.
APA	Liu, Yingying[1].,Xu, Xinyue[2].,Chen, Ying[3].,Zhang, Yuan[4].,Gao, Xinghua[5].,...&Wen, Weijia[9].(2018).An integrated micro-chip with Ru/Al2O3/ZnO as sensing material for SO2 detection.SENSORS AND ACTUATORS B-CHEMICAL,262,26-34.
MLA	Liu, Yingying[1],et al."An integrated micro-chip with Ru/Al2O3/ZnO as sensing material for SO2 detection".SENSORS AND ACTUATORS B-CHEMICAL 262(2018):26-34.

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