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	Fabrication of high energy x-ray compound kinoform lenses using x-ray lithography
	Liu, Jing; Zhang, Weiwei; Chang, Guangcai; Yi, Futing
刊名	Microsystem technologies-micro-and nanosystems-information storage and processing systems
	2017-05-01
卷号	23期号:5页码:1553-1562
ISSN号	0946-7076
DOI	10.1007/s00542-017-3304-1
通讯作者	Liu, jing(liujing1987@ihep.ac.cn)
英文摘要	Nickel high energy x-ray compound kinoform lenses were fabricated by x-ray lithography technology at beijing synchrotron radiation facility. the nickel compound refractive lenses aim at focusing x-ray with 50 kev and the designed smallest width of the tooth-like segment is 2.5 mu m. to keep the best morphology of the element, au masks were made twice, whose thickness gradually increased. the fabrication process of compound lenses consists of three parts in general, including the intermediate mask (1.2 mu m thick au pattern) fabrication, the working mask (12 mu m thick au pattern) fabrication and the 300 mu m high lenses fabrication. the intermediate mask was made by uv lithography (uv sample) and electron beam direct write lithography (ebdw sample) for comparison, and the ebdw sample had a better morphology than the uv sample at each step. both samples were tested using the knife-edge scan method at bl13w1 beamline in shanghai synchrotron radiation facility, which provided the focal widths of 9.2 and 10.4 mu m, and the photon flux gains of 6.9 and 5.4 for the ebdw and uv samples at an x-ray energy with 50 kev, respectively.
WOS关键词	REFRACTIVE LENSES ; OPTICS
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	SPRINGER
WOS记录号	WOS:000400083300046
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2177211
专题	高能物理研究所
通讯作者	Liu, Jing
作者单位	Chinese Acad Sci, Beijing Synchrotron Radiat Facil, Inst High Energy Phys, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Liu, Jing,Zhang, Weiwei,Chang, Guangcai,et al. Fabrication of high energy x-ray compound kinoform lenses using x-ray lithography[J]. Microsystem technologies-micro-and nanosystems-information storage and processing systems,2017,23(5):1553-1562.
APA	Liu, Jing,Zhang, Weiwei,Chang, Guangcai,&Yi, Futing.(2017).Fabrication of high energy x-ray compound kinoform lenses using x-ray lithography.Microsystem technologies-micro-and nanosystems-information storage and processing systems,23(5),1553-1562.
MLA	Liu, Jing,et al."Fabrication of high energy x-ray compound kinoform lenses using x-ray lithography".Microsystem technologies-micro-and nanosystems-information storage and processing systems 23.5(2017):1553-1562.

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