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	Fabrication of inverted pyramid structure by cesium chloride self-assembly lithography for silicon solar cell
	Liu, Jing1,2; Zhang, Xinshuai1,2; Sun, Gangjie1,2; Wang, Bo1; Zhang, Tianchong1; Yi, Futing1; Liu, Peng1
刊名	Materials science in semiconductor processing
	2015-12-01
卷号	40页码:44-49
关键词	Fabrication Cscl self-assembly Inverted pyramid Silicon solar cell
ISSN号	1369-8001
DOI	10.1016/j.mssp.2015.05.048
通讯作者	Yi, futing(yift@ihep.ac.cn)
英文摘要	Inverted pyramids were fabricated through a method combining cesium chloride (cscl) self-assembly technology and anisotropy corrosion of silicon solar cells. ti film with nanoporous masks was formed by lift-off the cscl nanoislands for the inverted pyramids. the pyramids were then formed by anisotropy corrosion of alkaline solution. the average diameter and morphology of the pyramids were controlled by varying the average diameter of cscl nanoislands from 400 nm to 1.5 mu m and by varying the etching time of alkaline solution from 2 to 8 min. the inverted-pyramid texture could suppress reflection to below 10% at wavelengths from 400 to 1000 nm, which was much lower than that of planar wafer. a solar cell fabricated from the pyramids had higher short-circuit current density (j(sc)) and photovoltaic conversion efficiency (pce) compared with those of planar solar cells for the good antireflection property. the solar cell showed a pce of 15.25%, a j(sc) of 38.35 ma/cm(2), and an open-circuit voltage of 555.7 mv. (c) 2015 elsevier ltd. all rights reserved.
WOS关键词	MONOCRYSTALLINE SILICON ; SURFACE ; ANTIREFLECTION ; TEXTURIZATION ; ARRAYS
WOS研究方向	Engineering ; Materials Science ; Physics
WOS类目	Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCI LTD
WOS记录号	WOS:000363344600006
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2176477
专题	高能物理研究所
通讯作者	Yi, Futing
作者单位	1.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Liu, Jing,Zhang, Xinshuai,Sun, Gangjie,et al. Fabrication of inverted pyramid structure by cesium chloride self-assembly lithography for silicon solar cell[J]. Materials science in semiconductor processing,2015,40:44-49.
APA	Liu, Jing.,Zhang, Xinshuai.,Sun, Gangjie.,Wang, Bo.,Zhang, Tianchong.,...&Liu, Peng.(2015).Fabrication of inverted pyramid structure by cesium chloride self-assembly lithography for silicon solar cell.Materials science in semiconductor processing,40,44-49.
MLA	Liu, Jing,et al."Fabrication of inverted pyramid structure by cesium chloride self-assembly lithography for silicon solar cell".Materials science in semiconductor processing 40(2015):44-49.

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