Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology

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	Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology
	Xu HH ; Li ZY ; Zhu Y ; Li YT ; Yu YD ; Yu JZ
刊名	optical engineering
	2011
卷号	50 期号:4 页码:article no.44001
关键词	silicon photonics modulation grating coupler pre-emphasis MACH-ZEHNDER MODULATOR CARRIER-DEPLETION WAVE-GUIDES COMPACT
ISSN号	0091-3286
通讯作者	xu, hh, chinese acad sci, inst semicond, state key lab integrated optoelect, a35,qinghua e rd, beijing 100083, peoples r china. xu_haihua@semi.ac.cn
学科主题	光电子学
收录类别	SCI
资助信息	national basic research program of china [2006cb302803]; national natural science foundation of china [60877036]; state key laboratory of advanced optical communication systems and networks, china [2008sh02]; institute of semiconductors, chinese academy of sciences [iscas2008t10]
语种	英语
公开日期	2011-07-05 ; 2011-07-15
附注	a silicon p-i-n diode mach-zehnder optical modulator integrated with grating couplers is fabricated in 0.18-mu m complementary metal oxide semiconductor technology. the device has an ultracompact length of 200 mu m. high modulation efficiency with a figure of merit of v pi l = 0.22 v mm is demonstrated. a novel pre-emphasis technique is introduced to achieve high-speed modulation, and a data transmission rate of 3 gbps is present. (c) 2011 society of photo-optical instrumentation engineers (spie). [doi: 10.1117/1.3560264]
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/20963]
专题	半导体研究所_集成光电子学国家重点实验室
推荐引用方式 GB/T 7714	Xu HH,Li ZY,Zhu Y,et al. Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology[J]. optical engineering,2011,50(4):article no.44001.
APA	Xu HH,Li ZY,Zhu Y,Li YT,Yu YD,&Yu JZ.(2011).Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology.optical engineering,50(4),article no.44001.
MLA	Xu HH,et al."Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology".optical engineering 50.4(2011):article no.44001.