Emitting far-field multicolor patterns and characters through plastic diffractive micro-optics elements illuminated by common Gaussian lasers in the visible range
Zhang XY ; Li H ; Liu K ; Luo J ; Xie CS ; Ji A ; Zhang TX
刊名journal of the optical society of america a-optics image science and vision
2011
卷号28期号:4页码:724-733
关键词OPTICAL-ELEMENTS ITERATIVE ALGORITHM PHASE ELEMENTS DESIGN FABRICATION ARRAYS LENS
ISSN号1084-7529
通讯作者zhang, xy, huazhong univ sci & technol, wuhan natl lab optoelect, wuhan 430074, hubei province, peoples r china. x_yzhang@yahoo.com.cn
学科主题微电子学
收录类别SCI
资助信息wuhan national laboratory for optoelectronics [0101187006]; national natural science foundation of china [60777003, 60736010]
语种英语
公开日期2011-07-06 ; 2011-07-15
附注far-field multicolor patterns and characters are emitted effectively in a relatively wide and deep spatial region by plastic diffractive micro-optics elements (dmoes), which are illuminated directly by common gaussian lasers in the visible range. phase-only dmoes are composed of a large number of fine step-shaped phase microstructures distributed sequentially over the plastic wafer selected. the initial dmoes in silicon wafer are fabricated by an innovative technique with a combination of a single-mask ultraviolet photolithography and low-cost and rapid wet koh etching. the fabricated silicon dmoes are further converted into a nickel mask by the conventional electrochemical method, and they are finally transferred onto the surface of the plastic wafer through mature hot embossing. morphological measurements show that the surface roughness of the plastic dmoes is in the nanometer range, and the feature height of the phase steps in diffractive elements is in the submicrometer scale, which can be designed and adjusted flexibly according to requirements. the dimensions of the dmoes can be changed from the order of millimeters to centimeters. a large number of pixel phase microstructures with a square microappearance employed to construct the phase-only dmoes are created by the gerchberg-saxton algorithm, according to the target patterns and characters and common gaussian lasers manipulated by the dmoes fabricated. (c) 2011 optical society of america
内容类型期刊论文
源URL[http://ir.semi.ac.cn/handle/172111/21329]  
专题半导体研究所_半导体集成技术工程研究中心
推荐引用方式
GB/T 7714
Zhang XY,Li H,Liu K,et al. Emitting far-field multicolor patterns and characters through plastic diffractive micro-optics elements illuminated by common Gaussian lasers in the visible range[J]. journal of the optical society of america a-optics image science and vision,2011,28(4):724-733.
APA Zhang XY.,Li H.,Liu K.,Luo J.,Xie CS.,...&Zhang TX.(2011).Emitting far-field multicolor patterns and characters through plastic diffractive micro-optics elements illuminated by common Gaussian lasers in the visible range.journal of the optical society of america a-optics image science and vision,28(4),724-733.
MLA Zhang XY,et al."Emitting far-field multicolor patterns and characters through plastic diffractive micro-optics elements illuminated by common Gaussian lasers in the visible range".journal of the optical society of america a-optics image science and vision 28.4(2011):724-733.
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