| Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating | |
| Min ZHANG; Xiao-gang HU; Xiao-xu YANG; Fei-fei XU; Kwang-Ho KIM; Zhi-gang SHAO | |
| 刊名 | Transactions of Nonferrous Metals Society of China
 |
| 2012 | |
| 卷号 | Vol.22 Suppl 1页码:s115-s119 |
| 关键词 | zirconium nitride (ZrN) thin film arc ion plating substrate bias microstructure |
| ISSN号 | 1003-6326;2210-3384 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/1855867 |
| 专题 | 辽宁师范大学 |
| 作者单位 | 1.Chinese Acad Sci, Dalian Inst Chem Phys, Fuel Cell Syst & Engn Lab, Dalian 116023, Peoples R China Chinese Academy of Sciences Dalian Institute of Chemical Physics, CAS 2.Pusan Natl Univ, Sch Mat Sci & Engn, Pusan 609735, South Korea Pusan National University Hospital Pusan National University 3.Liaoning Normal Univ, Sch Phys & Elect Technol, Dalian 116029, Peoples R China Liaoning Normal University |
| 推荐引用方式 GB/T 7714 | Min ZHANG,Xiao-gang HU,Xiao-xu YANG,et al. Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating[J]. Transactions of Nonferrous Metals Society of China,2012,Vol.22 Suppl 1:s115-s119. |
| APA | Min ZHANG,Xiao-gang HU,Xiao-xu YANG,Fei-fei XU,Kwang-Ho KIM,&Zhi-gang SHAO.(2012).Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating.Transactions of Nonferrous Metals Society of China,Vol.22 Suppl 1,s115-s119. |
| MLA | Min ZHANG,et al."Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating".Transactions of Nonferrous Metals Society of China Vol.22 Suppl 1(2012):s115-s119. |
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