Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors

doi:10.1016/j.snb.2018.09.074

	Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors
	Wang, Ying 1,2; Liu, Chengyao 1; Wang, Zhou 1; Song, Zhiwei 3; Zhou, Xinyuan 1; Han, Ning 1,2; Chen, Yunfa 1,2
刊名	SENSORS AND ACTUATORS B-CHEMICAL
	2019
卷号	278 页码:28-38
关键词	Au/SnO2:NiO thin films Heterostructure Self-assembly NO2 gas detection Thermal annealing Fermi level
ISSN号	0925-4005
DOI	10.1016/j.snb.2018.09.074
英文摘要	Here, heterostructured Au/SnO2:NiO thin films are fabricated by sputtering SnO2:NiO target onto the self-assembled Au nanoparticle (NPs, diameter similar to 9.5 nm) arrays and then activated by H-2 annealing. Compared with the SnO2 and SnO2:NiO thin film counterparts, the 20 nm thick Au/SnO2:NiO film shows the highest NO2 sensing performance after activated at optimized temperature of 500 degrees C, with high response of similar to 185 to 5 ppm NO2, low detection limit of similar to 50 ppb, high selectivity, good stability and also low sensor-to-sensor variation of < 15%. The gas sensing property enhancement could not only be attributed to catalytic role of the AuNPs, but also to the effective Schottky barrier and p-n junction formation between Au, SnO2 and NiO, which is verified by the relatively higher Fermi level of similar to 4.56 eV compared with those of 4.1-4.3 eV as measured by the ultraviolet photoelectron spectroscopy. Furthermore, this method is of generality to effectively enhance the electron transfer in other sensing materials like pure SnO2 and WO3, showing the promising potency of this MicroElectrical-Mechanical System (MEMS) compatible heterostucture fabrication method in wafer-scale gas sensor production with high sensitivity, selectivity and good consistency towards low concentration gas detection such as ppb-level NO2.
资助项目	National Key R&D Program of China[2016YFC0207100] ; Guangdong Innovative and Entrepreneurial Research Team Program[2014ZT05C146] ; Guangdong Innovative and Entrepreneurial Research Team Program[20150317025954531] ; State Key Laboratory of Multiphase Complex Systems[MPCS-2014-C-01]
WOS关键词	CORE-SHELL NANORODS ; SENSING PROPERTIES ; ROOM-TEMPERATURE ; PERFORMANCE ; NANOSTRUCTURES ; NANOCOMPOSITES ; FABRICATION ; NANOWIRES ; MICROSTRUCTURES ; HETEROJUNCTION
WOS研究方向	Chemistry ; Electrochemistry ; Instruments & Instrumentation
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000447620900005
资助机构	National Key R&D Program of China ; Guangdong Innovative and Entrepreneurial Research Team Program ; State Key Laboratory of Multiphase Complex Systems
内容类型	期刊论文
源URL	[http://ir.ipe.ac.cn/handle/122111/26264]
专题	中国科学院过程工程研究所
通讯作者	Han, Ning; Chen, Yunfa
作者单位	1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Inst Urban Environm, Ctr Excellence Reg Atmospher Environm, Xiamen 361021, Peoples R China 3.Chinese Acad Sci, Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Wang, Ying,Liu, Chengyao,Wang, Zhou,et al. Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors[J]. SENSORS AND ACTUATORS B-CHEMICAL,2019,278:28-38.
APA	Wang, Ying.,Liu, Chengyao.,Wang, Zhou.,Song, Zhiwei.,Zhou, Xinyuan.,...&Chen, Yunfa.(2019).Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors.SENSORS AND ACTUATORS B-CHEMICAL,278,28-38.
MLA	Wang, Ying,et al."Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors".SENSORS AND ACTUATORS B-CHEMICAL 278(2019):28-38.