Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation

doi:10.1021/acsami.7b16479

	Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
	Lv, Xinrui 1; Cao, Yunzhen ; Yan, Lu ; Li, Ying ; Zhang, Yuzhi ; Song, Lixin
刊名	ACS APPLIED MATERIALS & INTERFACES
	2018
卷号	10 期号:7 页码:6601
关键词	atomic layer deposition (ALD) VO2/MoO3 nanolaminates V1-xMoxO2 films semiconductor-to-metal transition (SMT) thermochromic performance
ISSN号	1944-8244
DOI	10.1021/acsami.7b16479
英文摘要	V1-xMoxO2 thin films were fabricated by nanolamination of VO2/MoO3 alternating layers using atomic layer deposition (ALD) process, in which tetrakis-dimethyl-amino vanadium(IV) [V(NMe2)(4)] and molybdenum hexacarbonyl(VI) [Mo(CO)(6)] were used as vanadium and molybdenum precursors, respectively. The dopant content of V1-xMoxO2 films was controlled by adjusting MoO3 cycle percentage (P-Mo) in ALD pulse sequence, which varied from 2 to 10%. Effects of PMo on V1-xMoxO2 crystal structure, morphology, semiconductor-to-metal transition properties, and optical transmittance were studied. A linear reduction of phase transition temperature (T-c) by approximately -11 degrees C/cycle % Mo was observed for V1-xMoxO2 films within P-Mo <= 5%. Notably, dramatic enhanced luminous transmittance (T-lum = 63.8%) and solar modulation (Delta T-sol = 23.5%) were observed for V1-xMoxO2 film with P-Mo = 7%.
学科主题	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
出版者	AMER CHEMICAL SOC
WOS记录号	WOS:000426143900060
资助机构	The authors would like to thank Rongxu Bai (Beneq Oy) for his assistance during ALD deposition. The current work is supported by the laboratory foundation of Chinese Academy of Sciences (grant no. 16S083). ; The authors would like to thank Rongxu Bai (Beneq Oy) for his assistance during ALD deposition. The current work is supported by the laboratory foundation of Chinese Academy of Sciences (grant no. 16S083).
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/24462]
专题	中国科学院上海硅酸盐研究所
作者单位	1.Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Lv, Xinrui,Cao, Yunzhen,Yan, Lu,et al. Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation[J]. ACS APPLIED MATERIALS & INTERFACES,2018,10(7):6601, 6607.
APA	Lv, Xinrui,Cao, Yunzhen,Yan, Lu,Li, Ying,Zhang, Yuzhi,&Song, Lixin.(2018).Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation.ACS APPLIED MATERIALS & INTERFACES,10(7),6601.
MLA	Lv, Xinrui,et al."Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation".ACS APPLIED MATERIALS & INTERFACES 10.7(2018):6601.