Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2018专题

	Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition
	Chee, Kuan W. A.; Meng, Fanping; Lai, David C.; Huang, Feng
刊名	CERAMICS INTERNATIONAL
	2018
卷号	44 期号:17 页码:20939-20946
关键词	Thin-films Electrical-properties Solar-cells Oxides Temperature Performance Substrate Figure Merit Azo
英文摘要	Transparent conducting electrodes have been systematically developed for optoelectronic devices and applications in industry through materials exploration and manufacturing process optimization. The nanostructural, optical and electrical properties were correlated with the embedded Ag interlayer thickness for the first time, for alpha-IGZO/Ag/alpha-IGZO trilayer electrodes fabricated using DC magnetron sputter deposition. Optimizing the Ag interlayer thickness at 14 nm achieves a maximum Haacke figure of merit (FOM) of 7.3 x 10(-3) Omega(-1), at least two orders of magnitude greater than that of the single IGZO film, with X-ray diffraction patterns indicating a crystalline phase that is also retained for thicker layers. Electrical and surface topography measurements confirm a uniform, continuous Ag interlayer film with bulk metallic behavior and resistivity as low as 6 x 10(-5) Omega cm. Experimentally-calibrated finite-element modeling and ray tracing simulations unravel in the multilayer films, backscattering and transmission effects from random surface roughness, as well as phonon- or ionized impurity-scattering mediated free carrier absorption plus surface/interface scattering and interference effects. Moreover, film thickness-sensitive tuning of the optical bandgap between 2.98 and 3.14 eV was demonstrated, yielding a maximum bandgap and Haacke FOM at the optimized Ag interlayer thickness, and with many-body interactions outcompeting the Burstein-Moss effect above this thickness.
学科主题	Chemistry ; Materials Science ; Physics
语种	英语
公开日期	2018-12-04
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/16981]
专题	2018专题
推荐引用方式 GB/T 7714	Chee, Kuan W. A.,Meng, Fanping,Lai, David C.,et al. Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition[J]. CERAMICS INTERNATIONAL,2018,44(17):20939-20946.
APA	Chee, Kuan W. A.,Meng, Fanping,Lai, David C.,&Huang, Feng.(2018).Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition.CERAMICS INTERNATIONAL,44(17),20939-20946.
MLA	Chee, Kuan W. A.,et al."Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition".CERAMICS INTERNATIONAL 44.17(2018):20939-20946.