A strong-oxidizing mixed acid derived high-quality silicon oxide tunneling layer for polysilicon passivated contact silicon solar cell

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	A strong-oxidizing mixed acid derived high-quality silicon oxide tunneling layer for polysilicon passivated contact silicon solar cell
	Tong, Hui; Liao, Mingdun; Zhang, Zhi; Wan, Yimao; Wang, Dan; Quan, Cheng; Cai, Liang; Gao, Pingqi; Guo, Wei; Li, Hao
刊名	SOLAR ENERGY MATERIALS AND SOLAR CELLS
	2018
卷号	188 页码:149-155
关键词	Si Solar Efficiency
英文摘要	We developed a new wet-chemical method to grow the high-quality tunnel silicon oxide (SiOx) layer by using a strong-oxidizing mixed acid, which consists of three volumes of HNO3 (68 wt%) and one volume of H2SO4 (98 wt%), named as the CNS (concentrated nitric and sulfuric) acid for short. In comparison with the HNO3 acid, the CNS acid grows high-quality SiOx layer with the higher oxidized state at 60 degrees C, where the relatively low temperature avoids the significant volatilization of acid and remains the quality of acid during the extending process. The results prove that the SiOx grown in the CNS acid benefits for the surface passivation of the n-type polysilicon passivated contact structure. An average gain of implied open circuit voltage (iV(oc)) by 2-10 mV and a reduction of single-side surface saturated dark current (J(0)) by 1-7 fA/cm(2) are obtained by using the 60 degrees C CNS-acid grown SiOx to replace the 60 degrees C HNO3-acid grown one. Also, in comparison with the 90 degrees C HNO3 acid, the 60 degrees C CNS acid exhibits improved stability and repeatability for preparing the SiOx during the extending process. The CNS-acid grown SiOx helps the polysilicon passivated contact solar cell to raise the efficiency by similar to 0.15% on average. In summary, the CNS acid has shown the potential for industrial application, which improves not only the manufacturing process but also the device performances.
学科主题	Materials Science
语种	英语
公开日期	2018-12-04
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/16968]
专题	2018专题
推荐引用方式 GB/T 7714	Tong, Hui,Liao, Mingdun,Zhang, Zhi,et al. A strong-oxidizing mixed acid derived high-quality silicon oxide tunneling layer for polysilicon passivated contact silicon solar cell[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS,2018,188:149-155.
APA	Tong, Hui.,Liao, Mingdun.,Zhang, Zhi.,Wan, Yimao.,Wang, Dan.,...&Ye, Jichun.(2018).A strong-oxidizing mixed acid derived high-quality silicon oxide tunneling layer for polysilicon passivated contact silicon solar cell.SOLAR ENERGY MATERIALS AND SOLAR CELLS,188,149-155.
MLA	Tong, Hui,et al."A strong-oxidizing mixed acid derived high-quality silicon oxide tunneling layer for polysilicon passivated contact silicon solar cell".SOLAR ENERGY MATERIALS AND SOLAR CELLS 188(2018):149-155.