Hard and wear resistant VB2 coatings deposited by pulsed DC magnetron sputtering

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	Hard and wear resistant VB2 coatings deposited by pulsed DC magnetron sputtering
	Ge, Fangfang; Chen, Chunli; Shu, Rui; Meng, Fanping; Li, Peng; Huang, Feng
刊名	VACUUM
	2017
卷号	135 页码:66-72
ISSN号	0042-207X
英文摘要	Vanadium boride (VB2) coatings have been less concerned, although they have advantages of super hardness as well as self-lubrication. In this study, VB2 coatings were deposited by pulsed DC magnetron sputtering, and the effect of deposition parameters on the microstructure, mechanical and tribological properties of coatings were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), nano- and micro-indentation, and ball-on-disk tribometer. Under the growth condition with high adatom mobility, the coatings exhibited complete (001) orientation and dense texture. A nanocomposite structure that nanocolumns were separated by a secondary phase was especially observed in the coating deposited at 773 K. Both hardness and intrinsic stress of the coatings were improved substantially by increasing the substrate bias or the pulse frequency. The coating deposited at-30 V and 250 kHz, had the hardness of similar to 43.6 GPa and the compressive stress of similar to 2.0 GPa. Under the load of 2 N, the friction coefficients were similar to 0.7 against Al2O3 counterpart, and the wear rates were in the range of 7 x 10(-16)-8 x 10(-16) m(3)/N m. Under the load of 5 N, the coatings with low intrinsic stress showed better wear resistance, with the wear rate of 10(-16) m(3)/N m. (C) 2016 Published by Elsevier Ltd.
公开日期	2017-12-25
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/14120]
专题	2017专题
推荐引用方式 GB/T 7714	Ge, Fangfang,Chen, Chunli,Shu, Rui,et al. Hard and wear resistant VB2 coatings deposited by pulsed DC magnetron sputtering[J]. VACUUM,2017,135:66-72.
APA	Ge, Fangfang,Chen, Chunli,Shu, Rui,Meng, Fanping,Li, Peng,&Huang, Feng.(2017).Hard and wear resistant VB2 coatings deposited by pulsed DC magnetron sputtering.VACUUM,135,66-72.
MLA	Ge, Fangfang,et al."Hard and wear resistant VB2 coatings deposited by pulsed DC magnetron sputtering".VACUUM 135(2017):66-72.