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题名	“雕塑”结构功能性薄膜及应用
作者	王斌
文献子类	博士
导师	齐红基
关键词	倾斜沉积技术 glancing angle deposition 各向异性光学性质 anisotropic optical property 光催化活性 photoactivity 电致变色性能 electrochromic property
其他题名	Functional application researches of “sculptured thin films” by glancing angle deposition
英文摘要	倾斜沉积技术是一种基于物理气相沉积过程中的自阴影效应的纳米材料制备技术，可以制备出倾斜柱状阵列结构、“Z”字形结构以及螺旋形结构。对比其他的纳米材料制备技术，倾斜沉积技术具备形貌控制、异质结构设计和成分可调的独一无二的技术特点。采用倾斜沉积技术，纳米柱状结构的直径、高度、长度都可以通过基片的倾斜角度和旋转速率进行精确控制。因此，掌握倾斜沉积技术的科研人员，可以精确地制备出不同形貌和结构的纳米材料，该技术具有廉价、高效以及无材料限制的特点。大量的研究开始集中在“雕塑”薄膜的光学和材料性质。在本论文中，我们研究了采用倾斜沉积技术制备的纳米薄膜的光学、材料、光催化活性及电致变色性能。主要工作如下： 对于光学性质方面，我们研究了光线对称入射“雕塑”薄膜的传播问题，“雕塑”薄膜的光学均匀性问题以及“雕塑”薄膜的相位延迟问题等等。通过对这些光学性质的研究，充分理解“雕塑”薄膜并且利用“雕塑”薄膜的光学性质制备出更多的光学元器件。基于光学性质的分析基础之上，开展了“雕塑”薄膜的材料性质的研究。我们制备了非晶TiO2“雕塑”薄膜，所有的TiO2“雕塑”薄膜都具有很清晰的纳米柱子结构。通过退火处理再结晶，得到了锐钛矿相的TiO2“雕塑”薄膜。分析讨论了TiO2“雕塑”薄膜经过退火之后的形貌，结构和光学性质变化。结果显示合适的退火温度能够构建良好的纳米结构并且得到纯锐钛矿相析出，这些有助于和锐钛矿相关的光催化实验和研究。为了充分理解TiO2“雕塑”薄膜的材料性质，对自掺杂TiO2-x“雕塑”薄膜的光催化活性进行了研究，详细的表征测试工作对TiO2“雕塑”薄膜在不同退火环境下的材料性质变化给出了充分的理解，并且获得了一种新型的依靠倾斜沉积技术的TiO2-x新型材料。基于对“雕塑”薄膜的全面了解，我们研究了对TiO2、WO3“雕塑”薄膜施加电压之后的光学性质变化。样品的透过率可以随着对“雕塑”薄膜施加负压而下降，并且透过率的调节可以通过调整电压进行很好的重复性调试。非晶氧化钨“雕塑”薄膜展现了最好的电致变色性能，包括最大的光学调制范围、最好的循环稳定性以及可调谐的角度选择特性。; The glancing angle deposition (GLAD) is a versatile nanofabrication technique based on the self-shadowing effect during the thin-film deposition process, which can be used for fabricating nanostructured thin films, such as titled nanorods array, zigzag nanorods and helical structure. Compared with other nanofabrication techniques, GLAD offers the unique features of morphology sculpture, hetero-nanostructure design and composition tenability. Using the GLAD, the nanorods height, diameter and the length are determined by the rotation speed, the deposition angle and the deposition rate. Thus, one can accurately generate nanorods with different controllable morphologies and nanostructures. The STF has the advantages of low cost, efficiency, and almost no material restriction. An increasing number of studies have focused on the optical，material properties of STF. This paper studied the optical, material, photoactivity and electrochromic properties of nanostructured thin films deposited by GLAD. For optical properties of STF, we studied the wave propagation of symmetry incidence on the STF, optical uniformity of STF, phase shift of polarized light through STF and so on. Through the researches of optical properties, we can understand the optical properties of STF, so that we could make full use of STF for developing optical components. Further, the materials properties of STF were studied. Amorphous TiO2 nanostructured thin films (TNFs) were deposited by the GLAD with an electron gun. All of the prepared TNFs were composed of discrete nanoscale columns, characterized by scanning electron microscope. With the annealing treatment, the pure anatase phase was transformed from amorphous TNFs. The morphological, structural and optical properties of TNFs under the annealing treatment were measured, and the evolvement mechanism was further analyzed. These results show that appropriate post-annealing treatment can build fine nanostructures and pure anatase precipitation, which can support the applications and researches about photocatalysis experiments for the anatase phase TNFs powerfully. For comprehending the material properties of TiO2 STF, the photocatalytic activities of stable self-doped TiO2-x nanostructured thin films were studied. Our work gives a comprehensive understanding of TNFs annealed under different thermal treatment conditions and highlights the design of novel TiO2-x based nanomaterial. Based on the comprehensive understanding of STF material, we measured the optical spectra of STF with modulated DC voltage. The transmittance of sample decreased with the negative voltage load for TiO2 and WO3 STF, and the change of transmittance can be adjusted with good repeatability. The WO3 as-grown amorphous films by GLAD exhibit the best electrochromic properties including the large optical modulation, fine cyclic stability and tunable angle selectivity.
学科主题	材料学
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/30942]
专题	中国科学院上海光学精密机械研究所
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	王斌. “雕塑”结构功能性薄膜及应用[D].

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