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题名	高重频飞秒激光焊接玻璃
作者	丁腾
文献子类	硕士
导师	赵全忠
关键词	超短脉冲激光 Ultra-short pulses laser 玻璃焊接 Glass welding 熔融区域 Molten zone, 焊接强度 Welding strength
其他题名	Glass welding by using high repetition rate femtosecond laser pulses
英文摘要	玻璃作为一种透明材料，对外在应力及温度变化非常敏感，广泛应用在MENS封装，生物医学等方面。玻璃之间以及玻璃和其他材料之间传统的连接方法（比如键合，胶合）存在连接强度较低，受温度影响大，稳定性差，老化现象严重的问题。超短脉冲激光由于超短的脉冲宽度和超高的峰值功率，在材料微纳加工领域中显示出独一无二的优势。利用高重频的超短脉冲激光与材料相互作用时产生的热累积效应可以实现玻璃之间的连接，不需要在两片玻璃之间添加吸收介质，不需要对材料进行热处理，应用前景广阔。本文主要采用高重频超短脉冲激光对多种成分的玻璃材料进行焊接研究，包括石英玻璃，铝硅酸盐玻璃，高硼硅玻璃等等，同时探究了激光频率和激光功率对熔融区域的影响。本文的主要工作以及取得的成果主要有以下三个方面： 1、利用热扩散模型对超短脉冲激光与石英玻璃相互作用产生的热累积效应进行了计算和模拟。从得到的温度变化曲线可以看到，当激光重复频率高于500 kHz时，激光脉冲在材料内部产生的温度随着脉冲数增加而增加，热累积效应明显。当激光重复频率为100 kHz时，每次脉冲作用之后玻璃会降到室温，没有热累积效应。 2、利用高重频飞秒激光成功实现了石英玻璃之间，高硼硅玻璃之间，铝硅酸盐玻璃之间和钠钙玻璃之间的焊接。针对石英玻璃，熔融区域由顶部空腔，中部熔融区域和底部的线形损伤组成，探究了激光频率和激光功率对焊接端面熔融区域三种结构的影响，进行了拉伸强度测试，得到了最大的焊接强度为12.15 MPa，同时对不同成分玻璃之间的焊接区域形貌进行了对比。除此之外，我们实现了光学贴合和非光学贴合条件下的玻璃之间的焊接，对比了高重频焊接与低重频焊接的差别，相比之下，高重频激光焊接速度快，焊接强度高。 3、运用高重频飞秒激光成功实现了石英玻璃和单晶硅之间的焊接。焊接过程中，激光聚焦焦点偏下层单晶硅20 μm左右，焊接成功之后，对焊线进行观察，发现焊线均匀整齐，没有崩边等现象。; Glass is sensitive to external stress and temperature changes for unique character, which has been widely used in MENS packaging, biomedicine and so on. The traditional connection methods (such as bonding and gluing) of the connection between glass or glass and other materials have many problems, such as low connection strength, temperature influence, poor stability, and serious aging phenomena. Owing to ultra-short pulse widths and ultra-high peak power, ultrashort pulse laser shows unique advantages in micro-nano processing. Using the heat accumulation effect of high repetition rate ultra-short laser when the laser interacts with materials, two pieces of glass can be joined successfully without any absorber or heating process, which is a promising method to join glass pieces. We have successfully welded various composion glass using high repetition rate ultra-short pulse laser, such as fused silica, alumina silicate glass, borosilicate glass, etc, and explored the influence of laser repetition rate and laser power on the melting zone. The main work and the results of this paper have three aspects: 1、The heat accumulation effect when the ultra-short pulse laser interacts with fused silica was calculated and simulated using thermal diffusion model. It can be seen from the obtained temperature change curve that when the laser repetition rate is higher than 500 kHz, the temperature of the laser pulse generated inside the material increases as the number of pulses increases, and the heat accumulation effect is significant. When the laser repetition rate is 100 kHz, the glass temperature will drops to room temperature after each pulse, and there will be no heat accumulation effect. 2、Two pieces of fused silica, high borosilicate glass, alumina silicate glass and soda-line glass were successfully welded in this letter using high repetition rate femtosecond pulses laser. The welding zone of fused silica comprises three parts, e.g, the circular cavity on the top, the molten area in the middle and the linear damage structure at the bottom. The influence of the laser frequency and the laser power on the three structures above was investigated. The tensile strength test was performed and the maximum welding strength obtained is 12.15 MPa. At the same time, the cross section of the welding seam for different composition glass differs greatly. Furthermore, we have realized the welding between glass under optical contact and non-optical contact conditions. By comparing the difference between high-frequency and low-frequency welding, we found the high-frequency laser welding is faster and have higher welding strength. 3、The welding of fused silica and silica was successfully achieved using high repetition rate femtosecond pulses laser. During the welding process, the laser focuses in the silicon with a depth of about 20 μm. After successful welding, the bonding wire is observed, and it is found that the bonding wire is even and orderly and without any broken edge.
学科主题	光学工程
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/31060]
专题	中国科学院上海光学精密机械研究所
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	丁腾. 高重频飞秒激光焊接玻璃[D].

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