Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 薄膜光学技术研究室（十一室）

	Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method
	Shang, Peng 1,2; Ji, Yi-Qin 1; Zhao, Dao-Ling 3; Xiong, Sheng-Ming 4; Liu, Hua-Song 1; Li, Ling-Hui 4; Tian, Dong 4
刊名	Guangzi Xuebao/Acta Photonica Sinica
	2017
卷号	46 期号:8 页码:0816003
关键词	Ions - Microstructure - Optical coatings - Residual stresses - Sapphire - Silica - Sputtering - Stability - Thermodynamic stability - Thin films
ISSN号	10044213
英文摘要	SiO2films are deposited on Si and sapphire (α-Al2O3) substrates by Dual Ion beam sputtering method. The microstructure, surface morphology, residual stress and optical stability of SiO2coating in the wavelength of 0.4~1.2 μm and 3~5 μm are investigated, systematically. The results indicate that the residual stress goes through a local minimum value at ~400. There is a close relationship between the optical constant and the surface conditions, residual stress, microstructure of SiO2film. As the temperature increases up to 1 000, SiO2film can keep well thermal stability without notable damage morphology. The result can give some guidance for designing the optical coatings used in harsh environments. © 2017, Science Press. All right reserved.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8803]
专题	光电技术研究所_薄膜光学技术研究室（十一室）
作者单位	1.Tianjin Key Laboratory of Optical Thin Film, Tianjin Jin Hang Institute Technical Physics, Tianjin; 300192, China; 2.State Key Labs of Modern Optical Instrumentation, Zhejiang University, Hangzhou; 310027, China; 3.Shandong Institute of Metrology, Jinan; 250014, China; 4.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China
推荐引用方式 GB/T 7714	Shang, Peng,Ji, Yi-Qin,Zhao, Dao-Ling,et al. Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method[J]. Guangzi Xuebao/Acta Photonica Sinica,2017,46(8):0816003.
APA	Shang, Peng.,Ji, Yi-Qin.,Zhao, Dao-Ling.,Xiong, Sheng-Ming.,Liu, Hua-Song.,...&Tian, Dong.(2017).Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method.Guangzi Xuebao/Acta Photonica Sinica,46(8),0816003.
MLA	Shang, Peng,et al."Thermal Stability of Mid-infrared SiO2Thin Films Deposited by Dual Ion Beam Sputtering Method".Guangzi Xuebao/Acta Photonica Sinica 46.8(2017):0816003.