Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry

doi:10.1364/AO.56.005139

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry
	Huang, L; Xue, JP; Gao, B; Zuo, C; Idir, M
刊名	APPLIED OPTICS
	2017
卷号	56 期号:18 页码:5139-5144
关键词	Least-squares Integration Stereo Deflectometry Gradient Data Calibration Improvement Spline Shape
ISSN号	1559-128X
DOI	10.1364/AO.56.005139
文献子类	期刊论文
英文摘要	There are wide applications for zonal reconstruction methods in slope-based metrology due to its good capability of reconstructing the local details on surface profile. It was noticed in the literature that large reconstruction errors occur when using zonal reconstruction methods designed for rectangular geometry to process slopes in a quadrilateral geometry, which is a more general geometry with phase measuring deflectometry. In this work, we present a new idea for the zonal methods for quadrilateral geometry. Instead of employing the intermediate slopes to set up height-slope equations, we consider the height increment as a more general connector to establish the height-slope relations for least-squares regression. The classical zonal methods and interpolation-assisted zonal methods are compared with our proposal. Results of both simulation and experiment demonstrate the effectiveness of the proposed idea. In implementation, the modification on the classical zonal methods is addressed. The new methods preserve many good aspects of the classical ones, such as the ability to handle a large incomplete slope dataset in an arbitrary aperture, and the low computational complexity comparable with the classical zonal method. Of course, the accuracy of the new methods is much higher when integrating the slopes in quadrilateral geometry. (c) 2017 Optical Society of America
WOS关键词	LEAST-SQUARES INTEGRATION ; STEREO DEFLECTOMETRY ; GRADIENT DATA ; CALIBRATION ; IMPROVEMENT ; SPLINE ; SHAPE
语种	英语
WOS记录号	WOS:000403821500005
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/28898]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
推荐引用方式 GB/T 7714	Huang, L,Xue, JP,Gao, B,et al. Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry[J]. APPLIED OPTICS,2017,56(18):5139-5144.
APA	Huang, L,Xue, JP,Gao, B,Zuo, C,&Idir, M.(2017).Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry.APPLIED OPTICS,56(18),5139-5144.
MLA	Huang, L,et al."Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry".APPLIED OPTICS 56.18(2017):5139-5144.