Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor

	Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor
	Zhang, Wen; Miao, Wei; Wang, Zheng; Liu, Dong; Zhong, Jia-Qiang; Guo, Xiao-Hui; Wu, F.; Yao, QiJun; Shi, Sheng-Cai
刊名	IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
	2017
卷号	27 期号:4
英文摘要	Superconducting transition edge sensors (TES) based on a Ti microbridge on Si substrate have demonstrated a very low noise equivalent power. Their effective response time, however, is in the order of microseconds due to relatively high transition temperature (i.e., 300-400 mK) of the Ti microbridge, making it difficult to read out the signal of a large Ti TES array with a SQUID-based multiplexer. We propose a twin-slot antenna coupled superconducting Ti microbridge separated from the antenna feed and supported by a free-standing membrane. Its resistive transition (R-T) and current-voltage (I-V) curves are measured before and after KOH wet etching of the Si substrate underneath the Ti microbridge. The free-standing membrane supported Ti TES with a thickness of 40 nm shows slightly lower transition temperature and higher normal resistance. Its thermal conductance is reduced to similar to 800 pW/ K from similar to 3000 pW/ K. In addition, its effective response time measured with a current pulse signal is about 5 mu s. The uniformity of the 8 x 8 TES array is studied by measuring the distribution of normal resistance and critical temperature. In order to improve the uniformity, we increase the Ti film thickness to 64 nm, and characterize its thermal and electrical features.
语种	英语
内容类型	期刊论文
源URL	[http://libir.pmo.ac.cn/handle/332002/17344]
专题	中国科学院紫金山天文台
推荐引用方式 GB/T 7714	Zhang, Wen,Miao, Wei,Wang, Zheng,et al. Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2017,27(4).
APA	Zhang, Wen.,Miao, Wei.,Wang, Zheng.,Liu, Dong.,Zhong, Jia-Qiang.,...&Shi, Sheng-Cai.(2017).Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,27(4).
MLA	Zhang, Wen,et al."Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 27.4(2017).