Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films

	Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films
	Wang Zhao-Liang ; Tang Da-Wei ; Jia Tao ; Mao An-Min
刊名	ACTA PHYSICA SINICA
	2007-02-01
卷号	56 期号:2 页码:747-754
关键词	3 omega method micro/nano film thermal conductivity microscale heating film
ISSN号	1000-3290
英文摘要	Analytical solution in terms of series for temperature oscillation in the heater/thermometer film is derived for 3 omega measurements. The complex temperature solution is seperated into the real and imaginary parts. Analysis is performed to show the effect of the combined parameters of ac frequency, heater width and sample thermal properties on the temperature oscillation. The mathematical model for the measurement is corrected based on the solution. Accordingly, a 3 omega setup is developed to determine thermal conductivity of 500 nm-thick thin film on Si substrate. Uncertainty analysis and comparison with the results of differential-3 omega methods and published values are made, the results show good mutual agreement. The thermal conductivities of SiO2 film and Si substrate are determined simultaneously with the series solution and by extension to high frequency. The method is also employed to measure the thermal conductivity of the multi-layer antireflective coating of ZrO2 /SiO2 deposited on Nd:YAG surface. The ZrO2 film has a thermal conductivity smaller than the volume value. The established 3 omega setup and analytical method can be applied to investigate the thermal performance of thin film-substrate structures for use with micro-systems such MEMS.
WOS研究方向	Physics
语种	英语
出版者	CHINESE PHYSICAL SOC
WOS记录号	WOS:000243986600023
内容类型	期刊论文
源URL	[http://ir.amss.ac.cn/handle/2S8OKBNM/4381]
专题	中国科学院数学与系统科学研究院
通讯作者	Tang Da-Wei
作者单位	1.Chinese Acad Sci, Inst Engn Thermophys, Beijing 100080, Peoples R China 2.Chinese Acad Sci, Acad Math & Syst Sci, Beijing 100080, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Wang Zhao-Liang,Tang Da-Wei,Jia Tao,et al. Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films[J]. ACTA PHYSICA SINICA,2007,56(2):747-754.
APA	Wang Zhao-Liang,Tang Da-Wei,Jia Tao,&Mao An-Min.(2007).Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films.ACTA PHYSICA SINICA,56(2),747-754.
MLA	Wang Zhao-Liang,et al."Analytical solution for temperature oscillation in the heater/thermometer film in 3 omega method and its application to thermal conductivity measurement of micro/nanometer-films".ACTA PHYSICA SINICA 56.2(2007):747-754.