Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point

doi:10.1016/j.vlsi.2017.05.008

CORC > 地质与地球物理研究所 > 中国科学院地质与地球物理研究所 > 中国科学院油气资源研究重点实验室

	Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point
	Li, Zongwei 1; Xiong, Xingyin 1; Liu, Xiong 2; Han, Kedu 1; Cong, Ning 1; Yang, Changchun 1
刊名	INTEGRATION-THE VLSI JOURNAL
	2017-09-01
卷号	59 页码:247-254
关键词	Micro-electro-mechanical systems (MEMS) Interface circuit Sigma-delta Analog-to-digital converter (ADC)
ISSN号	0167-9260
DOI	10.1016/j.vlsi.2017.05.008
文献子类	Article
英文摘要	Traditional analog blocks such as integrators are widely used in high precision MEMS accelerometers. However there is few cost-effective method to address the problem of analog integrators' output saturation due to the integrators' input offsets. A high precision digital capacitive MEMS accelerometer interface based on the traditional capacitive MEMS accelerometer sigma-delta interface is proposed to address this issue. An instantaneous floating point analog-to-digital converter (IFP ADC) is proposed to convert the analog frond end amplifier (AFE) output signal to digital signal. The IFP ADC is very effective to digitalize the signal of the proposed interface circuit output, which is similar to Gaussian distribution. A Matlab simulation model is developed to evaluate the theory model. The implementation of digital loop filter realized in a FPGA board can overcome integrator offset issue. In addition, it is much easier to optimize a digital loop filter's parameter and reduce the chip cost. In this work, the AFE and voltage reference etc. are successfully fabricated by using the 0.18 pm mixed-signal CMOS process. The sensitivity and the noise floor of the AFE are respectively 0.71 V/pF and 3.16 mu V/rt(Hz) in an open loop measurement. The evaluation PCB experimental result shows that the noise floor of the system is -135dBg/rt(Hz).
WOS研究方向	Computer Science ; Engineering
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000411419800025
资助机构	National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005)
内容类型	期刊论文
源URL	[http://ir.iggcas.ac.cn/handle/132A11/61973]
专题	地质与地球物理研究所_中国科学院油气资源研究重点实验室
通讯作者	Li, Zongwei
作者单位	1.Chinese Acad Sci, Inst Geol & Geophys, Key Lab Petr Resources Res, Beijing 100029, Peoples R China 2.Univ Calif Los Angeles, Elect Engn Dept, Los Angeles, CA 90024 USA
推荐引用方式 GB/T 7714	Li, Zongwei,Xiong, Xingyin,Liu, Xiong,et al. Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point[J]. INTEGRATION-THE VLSI JOURNAL,2017,59:247-254.
APA	Li, Zongwei,Xiong, Xingyin,Liu, Xiong,Han, Kedu,Cong, Ning,&Yang, Changchun.(2017).Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point.INTEGRATION-THE VLSI JOURNAL,59,247-254.
MLA	Li, Zongwei,et al."Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point".INTEGRATION-THE VLSI JOURNAL 59(2017):247-254.