Precise fabrication of a 5nm graphene nanopore with a helium ion microscope for biomolecule detection

doi:10.1088/1361-6528/28/4/045302

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 精准医疗单分子诊断技术研究中心

	Precise fabrication of a 5nm graphene nanopore with a helium ion microscope for biomolecule detection
	Deng, Yunsheng 1; Huang, Qimeng 1; Zhao, Yue 1,2; Zhou, Daming1 ; Ying, Cuifeng 1,3; Wang, Deqiang1
刊名	NANOTECHNOLOGY
	2017-01-27
卷号	28 期号:4 页码:7
关键词	solid-state nanopore helium ion milling DNA sequencing graphene
ISSN号	0957-4484
DOI	10.1088/1361-6528/28/4/045302
通讯作者	Wang, DQ (reprint author), Chinese Acad Sci, Chongqing Key Lab Multiscale Mfg Technol, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China.
英文摘要	We report a scalable method to fabricate high-quality graphene nanopores for biomolecule detection using a helium ion microscope (HIM). HIM milling shows promising capabilities for precisely controlling the size and shape, and may allow for the potential production of nanopores at wafer scale. Nanopores could be fabricated at different sizes ranging from 5 to 30 nm in diameter in few minutes. Compared with the current solid-state nanopore fabrication techniques, e.g. transmission electron microscopy, HIM is fast. Furthermore, we investigated the exposure-time dependence of graphene nanopore formation: the rate of pore expansion did not follow a simple linear relationship with exposure time, but a fast expansion rate at short exposure time and a slow rate at long exposure time. In addition, we performed biomolecule detection with our patterned graphene nanopore. The ionic current signals induced by 20-base single-stranded DNA homopolymers could be used as a basis for homopolymer differentiation. However, the charge interaction of homopolymer chains with graphene nanopores, and the conformations of homopolymer chains need to be further considered to improve the accuracy of discrimination.
资助项目	National Natural Science Foundations of China[61504146] ; National Natural Science Foundations of China[61471336] ; Joint-Scholar of West Light Foundation of the Chinese Academy of Sciences ; Instrument development program of CAS[YZ201568]
WOS研究方向	Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000391569000002
内容类型	期刊论文
源URL	[http://172.16.51.4:88/handle/2HOD01W0/267]
专题	精准医疗单分子诊断技术研究中心
通讯作者	Wang, Deqiang
作者单位	1.Chinese Acad Sci, Chongqing Key Lab Multiscale Mfg Technol, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China 2.Jilin Univ, Sch Instrumentat Sci & Elect Engn, Changchun 130000, Peoples R China 3.Nankai Univ, Sch Phys, Key Lab Weak Light Nonlinear Photon, Minist Educ, Tianjin 300071, Peoples R China
推荐引用方式 GB/T 7714	Deng, Yunsheng,Huang, Qimeng,Zhao, Yue,et al. Precise fabrication of a 5nm graphene nanopore with a helium ion microscope for biomolecule detection[J]. NANOTECHNOLOGY,2017,28(4):7.
APA	Deng, Yunsheng,Huang, Qimeng,Zhao, Yue,Zhou, Daming,Ying, Cuifeng,&Wang, Deqiang.(2017).Precise fabrication of a 5nm graphene nanopore with a helium ion microscope for biomolecule detection.NANOTECHNOLOGY,28(4),7.
MLA	Deng, Yunsheng,et al."Precise fabrication of a 5nm graphene nanopore with a helium ion microscope for biomolecule detection".NANOTECHNOLOGY 28.4(2017):7.