Synthesis and interface structures of Ti-Al-Si-N coatings

doi:10.13922/j.cnki.cjovst.2015.02.10

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 机器人与3D打印技术创新中心

	Synthesis and interface structures of Ti-Al-Si-N coatings
	Wang, Gengzhu 1; Chen, Tian2 ; Xie, Zhiwen 1,2; Song, Xiaohang 3; Gao, Xu 1; Yu, Xiaoguang 1; Song, Hua 1
刊名	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
	2015
卷号	35 期号:2 页码:179-183
ISSN号	16727126
DOI	10.13922/j.cnki.cjovst.2015.02.10
通讯作者	Xie, Zhiwen
英文摘要	The Ti-Al-Si-N coatings were synthesized by multi-plasma immersion ion implantation and deposition (MPIIID). The doping of Si and Al on the interface structures and mechanical property of the composite coatings were investigated. The as-deposited Ti-Al-Si-N coatings were characterized with X-ray diffraction, energy dispersive spectroscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, atomic force microscope and mechanical probes. The results show that the Si-doping strongly affects the micro- and phase structures of the super-hard Ti-Al-Si-N coatings, with TiAlN nano-grains embedded in Si3N4 layer. For example, as the Si-content increased, the TiAlN grain-size decreased and the Si3N4 layer thickened. At a low Si-content, the Si3N4 layer, thinner than 1 nm, crystallized and formed a coherent interface with the TiAlN grains, the hardness of the Ti-Al-Si-N coatings was found to be 40 GPa; but the hardness dropped down to 29 GPa because a 2 nm thick amorphous Si3N4 layer formed at a higher Si-content. ©, 2015, Science Press. All right reserved.
语种	中文
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/4621]
专题	机器人与3D打印技术创新中心
作者单位	1.University of Science and Technology Liaoning, Anshan, China; 2.Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, China; 3.Shanghai Aerospace Equipments Manufacturer, Shanghai, China
推荐引用方式 GB/T 7714	Wang, Gengzhu,Chen, Tian,Xie, Zhiwen,et al. Synthesis and interface structures of Ti-Al-Si-N coatings[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2015,35(2):179-183.
APA	Wang, Gengzhu.,Chen, Tian.,Xie, Zhiwen.,Song, Xiaohang.,Gao, Xu.,...&Song, Hua.(2015).Synthesis and interface structures of Ti-Al-Si-N coatings.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,35(2),179-183.
MLA	Wang, Gengzhu,et al."Synthesis and interface structures of Ti-Al-Si-N coatings".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 35.2(2015):179-183.