Silicon-mold-based fabrication method for manufacturing polyimide membrane with nano-protuberance array structure

doi:10.1109/3M-NANO.2016.7824957

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 微纳制造与系统集成研究中心

	Silicon-mold-based fabrication method for manufacturing polyimide membrane with nano-protuberance array structure
	Yang, Zheng1,2 ; Wu, Peng1,2 ; Rao, Xianhua 1,2; Yin, Shaoyun1,2 ; Du, Chunlei1,2
	2016
会议日期	July 18, 2016 - July 22, 2016
会议地点	Chongqing, China
DOI	10.1109/3M-NANO.2016.7824957
页码	217-220
英文摘要	A fabrication method based on the silicon mold for manufacturing antireflection PI membrane with nano-protuberance array structure is proposed. In this method, a silicon mold with nano-hole array is firstly fabricated by using PS sphere self-assembly, metal coating and reactive ion etching. Then, the PI precursor solution is spin coated on the silicon mould. Followed by the imidization with gradient increased temperature, the PI membrane with nano-protuberance array structure is obtained. Tested by SEM and AFM, the proposed method possesses a high replication accuracy. The fabricated mold and membrane show large-area ordered and good uniformity. The reflection testing result shows that the proposed method can be used to decrease the reflection of PI membrane efficiently. © 2016 IEEE.
会议录	6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2016
语种	英语
内容类型	会议论文
源URL	[http://119.78.100.138/handle/2HOD01W0/4823]
专题	微纳制造与系统集成研究中心集成光电技术研究中心
作者单位	1.Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing; 400714, China; 2.Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing; 400714, China
推荐引用方式 GB/T 7714	Yang, Zheng,Wu, Peng,Rao, Xianhua,et al. Silicon-mold-based fabrication method for manufacturing polyimide membrane with nano-protuberance array structure[C]. 见:. Chongqing, China. July 18, 2016 - July 22, 2016.