Influence of test equipment pose error on dividing error measurement based on autocollimator
Tian, Liu-De1,2; Zhao, Jian-Ke1; Wang, Tao1; Zhao, Huai-Xue1; Duan, Ya-Xuan1,2; Liu, Zhao-Hui1; Tian, Liu-De (tianliude@126.com)
刊名Guangxue Jingmi Gongcheng/Optics and Precision Engineering
2017-09-01
卷号25期号:9页码:2267-2276
ISSN号1004924X
DOI10.3788/OPE.20172509.2267
其他题名测试设备位姿失调对自准直仪法测量圆分度误差的影响
产权排序1
英文摘要

In order to improve the measurement accuracy of dividing error of encoders, the principle and method to measure dividing error by using angular polygon and autocollimator were introduced, and the error sources were analyzed. According to the measurement principle, coordinate systems of angular polygon and autocollimator were established. Utilizing the method of coordinate transformation, precise mathematical models were deduced for indicating the relationships between dividing error and misalignment errors, such as parallelism error between the angular polygon working surface and the axis of the tested unit, perpendicularity error between autocollimator optical axis and the working surface of angular polygon, parallelism error between vertical wire of the autocollimator and the axis of the tested unit. In order to verify the error models of misadjustment, three experiments were performed in the laboratory, taking the positioning error of a single-axis position turntable as test object. The experimental and theoretical results have good consistency and the maximum deviation was less than 0.9″, which indicate that the error models of misadjustment are applicable to guide dividing error measurement. © 2017, Science Press. All right reserved.

语种中文
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/29453]  
专题西安光学精密机械研究所_检测技术研究中心
西安光学精密机械研究所_光电测量技术实验室
通讯作者Tian, Liu-De (tianliude@126.com)
作者单位1.Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an; 710119, China
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Tian, Liu-De,Zhao, Jian-Ke,Wang, Tao,et al. Influence of test equipment pose error on dividing error measurement based on autocollimator[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(9):2267-2276.
APA Tian, Liu-De.,Zhao, Jian-Ke.,Wang, Tao.,Zhao, Huai-Xue.,Duan, Ya-Xuan.,...&Tian, Liu-De .(2017).Influence of test equipment pose error on dividing error measurement based on autocollimator.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(9),2267-2276.
MLA Tian, Liu-De,et al."Influence of test equipment pose error on dividing error measurement based on autocollimator".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.9(2017):2267-2276.
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