Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement

doi:10.1109/LPT.2017.2753279

CORC > 合肥物质科学研究院 > 中国科学院合肥物质科学研究院 > 中科院安徽光学精密机械研究所

	Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement
	Li, J.1; Wang, G. Y.1; Sun, J. N.2; Maier, R. R. J.2; Macpherson, W. N.2; Hand, D. P.2; Dong, F. Z.1
刊名	IEEE PHOTONICS TECHNOLOGY LETTERS
	2017-11-01
卷号	29 期号:21 页码:1836-1839
关键词	Optical Fabrication Fiber Optics Sensors Fabry-perot
DOI	10.1109/LPT.2017.2753279
文献子类	Article
英文摘要	We propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and focused ion beam (FIB) processing. FIB machining is also used to fabricate a 45 degrees mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6 g is measured with a resolution of similar to 0.01 g and a frequency range from dc to 500 Hz has been demonstrated. The cross-axis sensitivity is below -32 dB.
WOS关键词	FABRY-PEROT CAVITIES ; SENSING APPLICATIONS ; TOP CANTILEVERS ; ACCELEROMETER ; DESIGN ; TEMPERATURE ; FABRICATION ; PRESSURE ; SENSORS ; SYSTEMS
WOS研究方向	Engineering ; Optics ; Physics
语种	英语
WOS记录号	WOS:000413028100020
资助机构	Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1)
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/33788]
专题	合肥物质科学研究院_中科院安徽光学精密机械研究所
作者单位	1.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei 230031, Anhui, Peoples R China 2.Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland
推荐引用方式 GB/T 7714	Li, J.,Wang, G. Y.,Sun, J. N.,et al. Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2017,29(21):1836-1839.
APA	Li, J..,Wang, G. Y..,Sun, J. N..,Maier, R. R. J..,Macpherson, W. N..,...&Dong, F. Z..(2017).Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement.IEEE PHOTONICS TECHNOLOGY LETTERS,29(21),1836-1839.
MLA	Li, J.,et al."Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement".IEEE PHOTONICS TECHNOLOGY LETTERS 29.21(2017):1836-1839.