Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction

doi:10.1111/jmi.12413

CORC > 合肥物质科学研究院 > 中国科学院合肥物质科学研究院 > 中科院固体物理研究所

	Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction
	Wang, Y. Z.1; Kong, M. G.2; Liu, Z. W.1; Lin, C. C.1; Zeng, Y.1
刊名	JOURNAL OF MICROSCOPY
	2016-10-01
卷号	264 期号:1 页码:34-40
关键词	Correlation Coefficient Spatial Resolution Transmission Electron Backscatter Diffraction
DOI	10.1111/jmi.12413
文献子类	Article
英文摘要	The spatial resolution of transmission electron backscatter diffraction (t-EBSD) with a standard conventional EBSD detector was evaluated quantitatively based on the calculation of the correlation coefficient of transmission patterns which were acquired across a twin boundary in the sample of austenitic steel. The results showed that the resolution of t-EBSD improved from tens of nanometres to below 10 nm with increasing accelerating voltage and thinning of specimen thickness. High voltage could enhance the penetration depth and reduce the scattering angle. And the thinning of specimen thickness would result in decreasing of the scattering events according to the theory of thermal diffuse scattering (TDS). In addition, the transmission patterns were found to be weak and noisy if the specimen was too thin, because of the decreasing intensity detected by the screen. Consequently, in this work, the best spatial resolution of 7 nm was achieved at 30 kV and 41 nm thickness. Moreover, the specimen thickness range was also discussed using Monte-Carlo simulation. This approach was helpful to account for the differences of measured spatial resolutions, by t-EBSD, of lamellas with different thickness.
WOS关键词	KIKUCHI DIFFRACTION ; EBSD ; PATTERNS
WOS研究方向	Microscopy
语种	英语
WOS记录号	WOS:000383539300005
资助机构	Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290)
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/24085]
专题	合肥物质科学研究院_中科院固体物理研究所
作者单位	1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, 1295 Dingxi Rd, Shanghai, Peoples R China 2.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei, Anhui, Peoples R China
推荐引用方式 GB/T 7714	Wang, Y. Z.,Kong, M. G.,Liu, Z. W.,et al. Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction[J]. JOURNAL OF MICROSCOPY,2016,264(1):34-40.
APA	Wang, Y. Z.,Kong, M. G.,Liu, Z. W.,Lin, C. C.,&Zeng, Y..(2016).Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction.JOURNAL OF MICROSCOPY,264(1),34-40.
MLA	Wang, Y. Z.,et al."Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction".JOURNAL OF MICROSCOPY 264.1(2016):34-40.