Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry
	Shan, Yao; Zeng, Aijun; He, Hongbo; Gu, Liyuan; Hu, Guohang; Sytchkova, Anna; Zhao, Yuanan
刊名	Appl. Optics
	2017
卷号	56 期号:28 页码:7898
通讯作者	huguohang@siom.ac.cn ; anna.sytchkova@enea.it
英文摘要	A setup for surface-plasmon-resonance-(SPR) based imaging ellipsometry was developed, which gains from the sensitivities of both SPR and ellipsometry to ultrathin film parameters. It is based on Otto's configuration for prism -sample coupling and a wide-beam imaging ellipsometry. A set of ultrathin gold and silver films was measured to determine their optical constants and thicknesses. Coupling the sample using a prism with a convex surface enables us to capture images of generated SPR elliptical fringes, which correspond to different SPR amplitude values at different air gap thicknesses. Analysis of the images acquired at different polarizer and analyzer angles provides the ellipsometric functions. and. versus thickness of air gap and hence the extraction of the optical constants of ultrathin metal films. The measured film thickness is in agreement with the results of x-ray reflectivity measurements.
收录类别	SCI
资助信息	National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799]
WOS记录号	WOS:000412053200017
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28131]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Shan, Yao,Zeng, Aijun,He, Hongbo,et al. Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry[J]. Appl. Optics,2017,56(28):7898.
APA	Shan, Yao.,Zeng, Aijun.,He, Hongbo.,Gu, Liyuan.,Hu, Guohang.,...&Zhao, Yuanan.(2017).Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry.Appl. Optics,56(28),7898.
MLA	Shan, Yao,et al."Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry".Appl. Optics 56.28(2017):7898.