Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
	Fang, Wei; Cheng, Ya; Wang, Min; Qiao, Lingling; Xu, Yingxin; Fang, Zhiwei; Lin, Jintian
刊名	Sci Rep
	2017
卷号	7
通讯作者	jintianlin@siom.ac.cn ; wfang08@zju.edu.cn ; ya.cheng@siom.ac.cn
英文摘要	We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5).
收录类别	SCI
资助信息	National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34]
WOS记录号	WOS:000398952300001
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/27680]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Fang, Wei,Cheng, Ya,Wang, Min,et al. Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing[J]. Sci Rep,2017,7.
APA	Fang, Wei.,Cheng, Ya.,Wang, Min.,Qiao, Lingling.,Xu, Yingxin.,...&Lin, Jintian.(2017).Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.Sci Rep,7.
MLA	Fang, Wei,et al."Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing".Sci Rep 7(2017).