Kinetic Monte Carlo simulation of film morphologies at the initial stages

doi:10.1007/s11433-007-0011-4

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	Kinetic Monte Carlo simulation of film morphologies at the initial stages
	Zheng, XP; Zhang, PF; He, DY; Li, L; Zhang, PF (reprint author), Lanzhou Univ, Post Doctor Working Stn, Lanzhou 730070, Peoples R China.
刊名	SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY
	2008-01
卷号	51 期号:1 页码:56-63
关键词	film initial stage morphologies simulation Kinetic Monte Carlo (KMC)
ISSN号	1672-1799
DOI	10.1007/s11433-007-0011-4
文献子类	Article
英文摘要	The morphologies at the initial stages of thin film growth were studied by using Kinetic Monte Carlo techniques. A more efficient model was used to calculate the activity energy. The model involves incident atom attachment, diffusion, detachment from the surface, detached atom returning, and dimer diffusion. We edited a set of software of the model and simulated the surface morphologies by the principle of computer graphics. It is shown that the nucleuses formed at the initial stages and the surface morphologies at high temperatures are very different from those at low temperatures. The later surface growth depends on the nucleuses at the initial stages. The mechanism results from the atom thermal movement, the temperature determines the diffusion ability, and the deposition rate determines the diffusion time.
学科主题	Physics
出版地	BEIJING
语种	英语
WOS记录号	WOS:000251412500007
内容类型	期刊论文
源URL	[http://ir.lzu.edu.cn/handle/262010/126791]
专题	学院待认领_期刊论文
通讯作者	Zhang, PF (reprint author), Lanzhou Univ, Post Doctor Working Stn, Lanzhou 730070, Peoples R China.
推荐引用方式 GB/T 7714	Zheng, XP,Zhang, PF,He, DY,et al. Kinetic Monte Carlo simulation of film morphologies at the initial stages[J]. SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY,2008,51(1):56-63.
APA	Zheng, XP,Zhang, PF,He, DY,Li, L,&Zhang, PF .(2008).Kinetic Monte Carlo simulation of film morphologies at the initial stages.SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY,51(1),56-63.
MLA	Zheng, XP,et al."Kinetic Monte Carlo simulation of film morphologies at the initial stages".SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY 51.1(2008):56-63.