Controllable preparation of fluorine-containing fullerene-like carbon film

doi:10.1016/j.apsusc.2016.02.171

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	Controllable preparation of fluorine-containing fullerene-like carbon film
	Wang, J; Liang, AM; Wang, FG; Xu, LH; Zhang, JY; Zhang, JY (reprint author), Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China.
刊名	APPLIED SURFACE SCIENCE
	2016-05-01
卷号	370 页码:291-296
关键词	F-FLC film Bias voltage Microstructure Mechanical properties Tribological properties
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2016.02.171
文献子类	Article
英文摘要	Fluorine-containing fullerene-like carbon (F-FLC) films were prepared by high frequency unipolar pulse plasma-enhanced chemical vapor deposition. The microstructures, mechanical properties as well as the tribological properties of the films were investigated. The results indicate that fullerene-like microstructures appear in amorphous carbon matrix and increase greatly with the increase of bias voltage from -600 to -1600V. And the fluorine contents in F-FLC films also show a minor rise. In addition, the hardness enhances with the bias voltage and the outstanding elastic recovery maintains because of the formation of fullerene-like microstructures in the F-FLC films. Undoubtedly, the F-FLC film deposited under high bias voltage owns a superiorly low friction, which combines the merits of fluorinated carbon film and fullerene-like carbon film. Moreover, the film also shows a remarkable wear resistance, which is mainly attributed to the excellent mechanical properties. This study provides new insights for us to prepare fluorine-containing FLC films with good mechanical and tribological properties. (C) 2016 Elsevier B.V. All rights reserved.
学科主题	Chemistry ; Materials Science ; Physics
出版地	AMSTERDAM
资助项目	国家重点基础研究发展计划以及国家重大科学研究计划（973计划）
项目编号	Major State Basic Research Development Program of China (973 Program) [2013CB632304]
语种	英语
WOS记录号	WOS:000374075000037
资助机构	MOST
内容类型	期刊论文
源URL	[http://ir.lzu.edu.cn/handle/262010/179498]
专题	口腔医学院_期刊论文
通讯作者	Wang, FG; Zhang, JY (reprint author), Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China.
推荐引用方式 GB/T 7714	Wang, J,Liang, AM,Wang, FG,et al. Controllable preparation of fluorine-containing fullerene-like carbon film[J]. APPLIED SURFACE SCIENCE,2016,370:291-296.
APA	Wang, J,Liang, AM,Wang, FG,Xu, LH,Zhang, JY,&Zhang, JY .(2016).Controllable preparation of fluorine-containing fullerene-like carbon film.APPLIED SURFACE SCIENCE,370,291-296.
MLA	Wang, J,et al."Controllable preparation of fluorine-containing fullerene-like carbon film".APPLIED SURFACE SCIENCE 370(2016):291-296.