GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD

	GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD
刊名	PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
	1994-05-16
卷号	143 期号:1 页码:K13-K17
ISSN号	0031-8965
通讯作者	GUO, YP (reprint author), LANZHOU UNIV,DEPT PHYS,LANZHOU 730001,PEOPLES R CHINA.
学科主题	Materials Science; Physics
语种	英语
WOS记录号	WOS:A1994NT12700026
内容类型	期刊论文
源URL	[http://202.201.7.4/handle/262010/106404]
专题	物理科学与技术学院_期刊论文
推荐引用方式 GB/T 7714	. GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,1994,143(1):K13-K17.
APA	(1994).GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD.PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,143(1),K13-K17.
MLA	"GROWTH OF CUBIC BORON-NITRIDE FILMS BY HOT-FILAMENT ASSISTED RF PLASMA CVD".PHYSICA STATUS SOLIDI A-APPLIED RESEARCH 143.1(1994):K13-K17.