Kinetics of atomic force microscope-based scanned probe oxidation on an octadecylated silicon(111) surface

	Kinetics of atomic force microscope-based scanned probe oxidation on an octadecylated silicon(111) surface
	Yang ML ; Zheng ZK ; Liu YQ ; Zhang BL
刊名	journal of physical chemistry b
	2006
卷号	110 期号:21 页码:10365-10373
关键词	SELF-ASSEMBLED MONOLAYERS HYDROGEN-PASSIVATED SILICON FIELD-INDUCED OXIDATION INDUCED LOCAL OXIDATION ALKYL MONOLAYERS CONSTRUCTIVE NANOLITHOGRAPHY CHEMICAL-MODIFICATION ORGANIC MONOLAYERS ANODIC-OXIDATION ANODIZATION LITHOGRAPHY
ISSN号	1520-6106
通讯作者	zhang bl
中文摘要	atomic force microscope (afm)-based scanned probe oxidation (spo) nanolithography has been carried out on an octadecyl-terminated si(111) surface to create dot-array patterns under ambient conditions in contact mode. the kinetics investigations indicate that this spo process involves three stages. within the steadily growing stage, the height of oxide dots increases logarithmically with pulse duration and linearly with pulse voltage. the lateral size of oxide dots tends to vary in a similar way. our experiments show that a direct-log kinetic model is more applicable than a power-of-time law model for the spo process on an alkylated silicon in demonstrating the dependence of oxide thickness on voltage exposure time within a relatively wide range. in contrast with the spo on the octodecysilated sio2/silicon surface, this process can be realized by a lower voltage with a shorter exposure time, which will be of great benefit to the fabrication of integrated nanometer-sized electronic devices on silicon-based substrates. this study demonstrates that the alkylated silicon is a new promising substrate material for silicon-based nanolithography.
收录类别	SCI
语种	英语
WOS记录号	WOS:000237844900026
公开日期	2010-08-17
内容类型	期刊论文
源URL	[http://ir.ciac.jl.cn/handle/322003/15981]
专题	长春应用化学研究所_长春应用化学研究所知识产出_期刊论文
推荐引用方式 GB/T 7714	Yang ML,Zheng ZK,Liu YQ,et al. Kinetics of atomic force microscope-based scanned probe oxidation on an octadecylated silicon(111) surface[J]. journal of physical chemistry b,2006,110(21):10365-10373.
APA	Yang ML,Zheng ZK,Liu YQ,&Zhang BL.(2006).Kinetics of atomic force microscope-based scanned probe oxidation on an octadecylated silicon(111) surface.journal of physical chemistry b,110(21),10365-10373.
MLA	Yang ML,et al."Kinetics of atomic force microscope-based scanned probe oxidation on an octadecylated silicon(111) surface".journal of physical chemistry b 110.21(2006):10365-10373.