antenna gain affected by reflector surface figure accuracy and dimension stability directly, so one of the most important tasks is how to ensure the surface precision and dimensional stability. it is hard to control surface precision for springback of metal, so carbon fibre reinforced polymer (cfrp) usually be adopted to fabricate high precision reflector. with the rapid development of electronic technology, especially millimetre and terahertz wave technology, the precision of reflector needed increasingly. a φ300mm cfrp flat reflector is developed for process study. in order to improve the thermal stability, a special "all cfrp" structure adopted. optical replica process used to realize surface modification of cfrp reflector blank, final surface figure accuracy rms reaching 0.1μm, and roughness ra reaching 2nm. further thermal stability tests show that the thermal stability reaching 13nm/c. aφ500mm cfrp aspherical reflector also fabricated, and surface accuracy reaching 0.4μm. the study is of certain reference value for the development of cfrp reflector in millimetre wave and terahertz wave band.