| 非均匀热场条件下多晶硅定向凝固研究; Directional Solidification of Polycrystalline Silicon in Non-uniform Thermal Field | |
| 朱徐立 ; 洪永强 | |
| 2015-08-15 | |
| 关键词 | 多晶硅 定向凝固 对流 polycrystalline silicon directional solidification convection |
| 英文摘要 | 设计一种辐射加热装置环状布置的多晶硅定向凝固设备,通过构建非均匀热场,使硅熔体侧壁区域温度高于中央区域,在熔体密度差的作用力下,液相自然对流强度加剧,使固液界面富集的杂质加速汇聚至熔体表面,提高杂质提纯效率,并在满足工艺要求的同时达到节能目的。进行数学建模和数值模拟研究来阐述该热场的设计原理,并通过试验验证。试验表明,环状加热方式使晶粒生长方向略微外倾,相对于传统加热方式,其能耗更低、并提高了除P、Al效率。; A directional solidification equipment with annular radiation heat device is designed for polysilicon purification.By constructing an inhomogeneous hot field,the temperature of the lateral wall of the silicon melt is higher than that of the central region.The natural convection intensity of the liquid phase increases because of the melt density difference.So the impurity in the solid-liquid interface accelerates converging to the surface of the melt.It can make strong natural convection in the liquid phase,improve impurities purification efficiency,meet the process and achieve the purpose of energy saving at the same time.Theoretical research and numerical simulation is used to illustrate the principle,and is verificated by experiment.Experiment results show the heating mode makes direction of grain growth slightly tilt outward,compared with the conventional heating mode,it makes energy consumption and content of P,Al lower.; 福建省高校产学合作科技重大项目(2012H6023); 福建省高端装备制造协同创新中心资助 |
| 语种 | zh_CN |
| 内容类型 | 期刊论文 |
| 源URL | [http://dspace.xmu.edu.cn/handle/2288/105895]  |
| 专题 | 航空航天－已发表论文 |
| 推荐引用方式 GB/T 7714 | 朱徐立,洪永强. 非均匀热场条件下多晶硅定向凝固研究, Directional Solidification of Polycrystalline Silicon in Non-uniform Thermal Field[J],2015. |
| APA | 朱徐立,&洪永强.(2015).非均匀热场条件下多晶硅定向凝固研究.. |
| MLA | 朱徐立,et al."非均匀热场条件下多晶硅定向凝固研究".(2015). |
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