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	All-solid-states thin film lithium-ion micro-battery with SnOx films doped with Cu as negative electrode
	Lin, Ji ; Liu, Chan ; Liu, Q ; Guo, Han ; Guo H(郭航)
	2014
关键词	Amorphous films Copper Design Lithium compounds Magnetrons Manufacture MEMS Nanostructures Oxide films Semiconductor doping Thin films
英文摘要	Conference Name:4th International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2013. Conference Address: Hong Kong, China. Time:September 10, 2013 - September 12, 2013.; Contr. Eng. and Info. Sci. Res. Assoc.(CEIS); Intl. Frontiers of Sci. and Technol. Res. Assoc. (IFST); National Chin-Yi University of Technology; Trans tech publications inc; For powering various micro/nano devices and systems, it is necessary to develop a thin film micro-battery with high capacity and outstanding cycle performance. By using radio frequency (RF) magnetrons sputtering, tin oxide thin films used for thin film micro-batteries negative electrode were deposited on silicon substrates. Besides, doping metal impurity Cu was used to improve the performance of the films. The results showed that with the increasing of Cu-doping content, the phase of thin oxide thin films tended from crystalline to amorphous, the capacity of SnOx films increased, and the cycle performance improved. Lastly, LiCoO2/LiPON/SnOx and LiCoO2/LiPON/CuySnOx all-solid-states thin film lithium-ion batteries were prepared with MEMS techniques, and the tests gave the conclusions that with the copper doping in the negative electrode, the capacity of thin film lithium-ion batteries increased, and the batteries showed better circulation property. ? (2014) Trans Tech Publications, Switzerland.
语种	英语
出处	http://dx.doi.org/10.4028/www.scientific.net/AMM.496-500.38
出版者	TRANS TECH PUBLICATIONS LTD
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86315]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Lin, Ji,Liu, Chan,Liu, Q,et al. All-solid-states thin film lithium-ion micro-battery with SnOx films doped with Cu as negative electrode. 2014-01-01.

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