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	Research and analysis of a laser-type high temperature pressure sensor based on SiC diaphragm
	Hu, Yanqing ; Hu, Guoqing ; Yi, Shaoxiang ; Zhang, Jianwei ; Hu GQ(胡国清)
	2012
关键词	Aerospace engineering Chemical analysis Chemical properties Deflection (structures) Diaphragms Finite element method High pressure engineering High temperature applications Laser theory Mathematical models Mechanical properties Partial pressure sensors Pressure Pressure sensors Silicon carbide Thermoelasticity Triangulation
英文摘要	Conference Name:2nd International Conference on Mechanical and Aerospace Engineering, ICMAE 2011. Conference Address: Bangkok, Thailand. Time:July 29, 2011 - July 31, 2011.; Int. Assoc. Comput. Sci. Inf. Technol. (IACSIT); In the field of high temperature sensing applications, Silicon carbide (SiC) is a superior material due to its excellent mechanical, thermal and chemical properties. Laser triangulation is a technology of non-contact, rapidity, and high accuracy. Its characteristic of non-contact can realize the high temperature non-resistance components' isolation from the high temperature components of the sensor effectively, so as to achieve measurement under high temperature. Meanwhile, its measurement accuracy can be further improved effectively by using the principle of lens imaging of magnification and constant focus, combining with the high-resolution photodetector. This paper first applied it to the measurement of pressure under high temperature, and proposed a laser-type high temperature pressure sensor using SiC diaphragm as the pressure-sensitive diaphragm. The sensor measured the center deflection of the circular SiC diaphragm caused by pressure and temperature using the laser triangulation, then created the corresponding relationship between the pressure, temperature and deflection according to the thermoelasticity theory. The paper first established the mathematical model of the high accuracy laser triangulation. Afterward did the thermomechanical finite element analysis of the SiC diaphragm using ANSYS. The research and analysis demonstrate that this technical scheme of measurement of pressure under high temperature is effective and feasible, and provide a forceful and important basis for the design and realization of the sensor. 漏 (2012) Trans Tech Publications, Switzerland.
语种	英语
出处	http://dx.doi.org/10.4028/www.scientific.net/AMM.110-116.1107
出版者	Trans Tech Publications
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86195]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Hu, Yanqing,Hu, Guoqing,Yi, Shaoxiang,et al. Research and analysis of a laser-type high temperature pressure sensor based on SiC diaphragm. 2012-01-01.

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