| A study of temperature dependence for capacitive pressure sensor | |
| Lv, Hao Jie ; Hu, Guo Qing ; Wang, Xing Ye ; Hu GQ(胡国清) | |
| 2012 | |
| 关键词 | Capacitance Finite element method Partial pressure sensors Pressure sensors Structural design |
| 英文摘要 | Conference Name:2011 International Conference on Vibration, Structural Engineering and Measurement, ICVSEM2011. Conference Address: Shanghai, China. Time:October 21, 2011 - October 23, 2011.; Guangzhou University; Cleveland State University; Xi'an Jiaotong University; Tongji University; The Hong Kong Polytechnic University; In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding. 漏 (2012) Trans Tech Publications. |
| 语种 | 英语 |
| 出处 | http://dx.doi.org/10.4028/www.scientific.net/AMM.105-107.2024 |
| 出版者 | Trans Tech Publications |
| 内容类型 | 其他 |
| 源URL | [http://dspace.xmu.edu.cn/handle/2288/86191]  |
| 专题 | 物理技术－会议论文 |
| 推荐引用方式 GB/T 7714 | Lv, Hao Jie,Hu, Guo Qing,Wang, Xing Ye,et al. A study of temperature dependence for capacitive pressure sensor. 2012-01-01. |
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