Growth Kinetic Processes of AlN Molecules on the Al-Polar Surface of AlN

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	Growth Kinetic Processes of AlN Molecules on the Al-Polar Surface of AlN
	Ma, Jun ; Zhuang, Qinqin ; Chen, Guran ; Huang, Chengcheng ; Li, Shuping ; Wang, Huiqiong ; Kang, Junyong ; Wang HQ(王惠琼)
刊名	http://dx.doi.org/10.1021/jp100084q
	2010-09-02
关键词	HIGH-QUALITY ALN CHEMICAL-VAPOR-DEPOSITION TOTAL-ENERGY CALCULATIONS WAVE BASIS-SET BEAM EPITAXY THIN-FILMS DIFFUSION SAPPHIRE SUBSTRATE MORPHOLOGY
英文摘要	National Program on Key Basic Research Project (973 Program); National Nature Science Foundation [60827004, 90921002, 60776066]; Science & Technology program of Fujian and Xiamen of China; We studied growth kinetic processes of AlN molecules on the Al-polar surface of AlN using ab initio and Monte Carlo simulations. Molecular processes were presented and analyzed during the nucleation, ripening, and coalescence stages. The results show that the nucleus number decreases as temperature rises due to the increasing diffusion of the molecules. By analyzing the growth time dependence of average cluster size, interface-limited Ostwald ripening is found to be the main ripening mechanism when the temperature is lower than 1773 K. As cluster-corner crossing diffusion is limited, the growth is fractal-like extension, and the coalescence is achieved through adhesion of clusters, leading to a generally continuous morphology with some vacancies and closure failures, which is in good agreement with our experimental results. Moreover, coverage/temperature kinetic phase diagrams under different deposition rates are presented (from 0.025 to 0.1 ML/s). Our finding suggests that a temperature higher than 1800 K is crucial for growth of an ideal atomic-scale Al-polar AlN surface.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/69661]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	Ma, Jun,Zhuang, Qinqin,Chen, Guran,et al. Growth Kinetic Processes of AlN Molecules on the Al-Polar Surface of AlN[J]. http://dx.doi.org/10.1021/jp100084q,2010.
APA	Ma, Jun.,Zhuang, Qinqin.,Chen, Guran.,Huang, Chengcheng.,Li, Shuping.,...&王惠琼.(2010).Growth Kinetic Processes of AlN Molecules on the Al-Polar Surface of AlN.http://dx.doi.org/10.1021/jp100084q.
MLA	Ma, Jun,et al."Growth Kinetic Processes of AlN Molecules on the Al-Polar Surface of AlN".http://dx.doi.org/10.1021/jp100084q (2010).