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	Interaction of defects and metals with nanocavities in silicon
	Williams, J. S. ; Ridgway, M. C. ; Conway, M. J. ; Wong-Leung, J. ; Zhu, X. F. ; Petravic, M. ; Fortuna, F. ; Ruault, M. O. ; Bernas, H. ; Kinomura, A. ; Nakano, Y. ; Hayashi, Y. ; Zhu XF(朱贤方)
	2001
关键词	HYDROGEN-INDUCED CAVITIES AMORPHIZATION IMPLANTATION DIFFUSION PLATINUM SILVER COPPER SI
英文摘要	Ion implantation of H or He into silicon, followed by annealing can create a band of nanocavities. Such nanocavities can exhibit a range of interesting and often non-equilibrium interactions with defects and metals during subsequent implantation and annealing. This paper gives an overview of such interactions, concentrating on cavities produced by H-implantation. The evolution of cavities during annealing is briefly treated, followed by illustrations of the very efficient gettering ability of cavities for fast diffusing metals. For low metal concentrations introduced into the nearsurface by implantation, the metal atoms decorate the cavity walls during annealing but can be displaced by oxygen under certain conditions. At high metal concentrations, precipitation and second phase (silicide) formation can occur at cavities but silicide formation and dissolution are found to be controlled by the availability or removal of silicon interstitials, leading to non-equilibrium behaviour. When silicon that contains cavities is irradiated with silicon ions, irradiation-induced defects interact with cavities, leading to preferential amorphisation at certain temperatures. Continued irradiation leads to cavity shrinkage during bombardment, which is most efficient when the region around the cavities is amorphised. (C) 2001 Elsevier Science B.V. All rights reserved.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/69430]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	Williams, J. S.,Ridgway, M. C.,Conway, M. J.,et al. Interaction of defects and metals with nanocavities in silicon[J],2001.
APA	Williams, J. S..,Ridgway, M. C..,Conway, M. J..,Wong-Leung, J..,Zhu, X. F..,...&朱贤方.(2001).Interaction of defects and metals with nanocavities in silicon..
MLA	Williams, J. S.,et al."Interaction of defects and metals with nanocavities in silicon".(2001).

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