Numerical studies on scavenging reaction in confined etchant layer technique (CELT)

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	Numerical studies on scavenging reaction in confined etchant layer technique (CELT)
	Zhou, Ping ; Kang, Renke ; Shi, Kang ; Guo, Dongming ; Shan, Kun ; Li, Zhe ; Shi K(时康)
刊名	http://dx.doi.org/10.1016/j.jelechem.2013.07.015
	2013
关键词	SCANNING ELECTROCHEMICAL MICROSCOPY N-GAAS LITHOGRAPHY MICROFABRICATION SURFACES PROBE
英文摘要	National Natural Science Foundation of China [91023043, 51105057]; China Postdoctoral Science Foundation [201104598]; Confined etchant layer technique (CELT) is an electro- or photo-chemically induced chemical etching method for micro machining with nanometer resolution. The etching resolution can be significantly improved by the introduction of scavenging reaction, which makes CELT distinguished from conventional chemical etching or electrochemical machining. But, the scavenging reaction makes CELT have a more complicated reaction system than scanning electrochemical microscopy (SECM). In order to reveal the mechanism of CELT and etching resolution related factors, an axisymmetric numerical simulation model is proposed in this paper. Based on this model, the scavenging reaction, the core feature of CELT, is simulated. The simulation results of scavenger concentration's effect on the cyclic voltammetry curve (CV curve) and etching resolution are qualitatively consistent with the experiment results. It is found that the scavenging reaction and etchant's concentration distribution are dramatically affected by scavenger's concentration and the distance between the working electrode and workpiece (working distance, WD). (C) 2013 Elsevier B.V. All rights reserved.
语种	英语
出版者	ELSEVIER SCIENCE SA
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/88905]
专题	化学化工－已发表论文
推荐引用方式 GB/T 7714	Zhou, Ping,Kang, Renke,Shi, Kang,et al. Numerical studies on scavenging reaction in confined etchant layer technique (CELT)[J]. http://dx.doi.org/10.1016/j.jelechem.2013.07.015,2013.
APA	Zhou, Ping.,Kang, Renke.,Shi, Kang.,Guo, Dongming.,Shan, Kun.,...&时康.(2013).Numerical studies on scavenging reaction in confined etchant layer technique (CELT).http://dx.doi.org/10.1016/j.jelechem.2013.07.015.
MLA	Zhou, Ping,et al."Numerical studies on scavenging reaction in confined etchant layer technique (CELT)".http://dx.doi.org/10.1016/j.jelechem.2013.07.015 (2013).