High frequency characteristics of soft magnetic Fe-O alloy thin films fabricated by helicon plasma sputtering

CORC > 厦门大学 > 材料学院－已发表论文

	High frequency characteristics of soft magnetic Fe-O alloy thin films fabricated by helicon plasma sputtering
	Peng, D. L. ; Wang, W. ; Chen, Y. ; Sumiyama, K. ; Hihara, T. ; Peng DL(彭栋梁)
刊名	http://dx.doi.org/10.1016/j.jallcom.2008.01.125
	2009-02-05
关键词	MICROSTRUCTURE
英文摘要	National Natural Science Foundation of China [50671087]; Intellectual Cluster Project of the Ministry of Education, Culture, Sports, Science, and Technology, Japan; Aichi Prefecture, Nagoya City and Aichi Science and Technology Foundation; The effect of oxygen-doping has been studied on the magnetic properties of Fe thin films produced at room temperature by a helicon-plasma-enhanced RF magnetron sputter-deposition. A reduction in magnetic coercivity due to rain refinement was achieved using very low dose of oxygen, which did not lead to the formation of crystalline Fe oxides with the low saturation magnetization. Moreover, it was demonstrated that oxygen-doping also enhances the in-plane uniaxial magnetic anisotropy of Fe films and thus can be applied beneficially to increase high-frequency permeability which is needed in microwave applications. (C) 2008 Elsevier B.V. All rights reserved.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/59424]
专题	材料学院－已发表论文
推荐引用方式 GB/T 7714	Peng, D. L.,Wang, W.,Chen, Y.,et al. High frequency characteristics of soft magnetic Fe-O alloy thin films fabricated by helicon plasma sputtering[J]. http://dx.doi.org/10.1016/j.jallcom.2008.01.125,2009.
APA	Peng, D. L.,Wang, W.,Chen, Y.,Sumiyama, K.,Hihara, T.,&彭栋梁.(2009).High frequency characteristics of soft magnetic Fe-O alloy thin films fabricated by helicon plasma sputtering.http://dx.doi.org/10.1016/j.jallcom.2008.01.125.
MLA	Peng, D. L.,et al."High frequency characteristics of soft magnetic Fe-O alloy thin films fabricated by helicon plasma sputtering".http://dx.doi.org/10.1016/j.jallcom.2008.01.125 (2009).