Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity
	Deng Songwen ; Qi Hongji ; Shao JD(邵建达)
刊名	surf. interface anal.
	2008
卷号	40 期号:12 页码:1562
关键词	multilayer structure x-ray reflectivity interface magnetron sputtering
ISSN号	0142-2421
中文摘要	a study on the layer structure of w/c multilayers deposited by magnetron sputtering is reported. in the study, soft x-ray resonant reflectivity and hard x-ray grazing incidence reflectivity of the w/c multilayers were measured. the imperfections at the interface such as interdiffusion and formation of compounds were dealt with by two methods. on analyzing the experimental results, we found that the incorporation of an interlayer was a more suitable method than the traditional statistical method to describe the layer structure of a w/c system we fabricated. the optical constants of each layer at a wavelength of 4.48 nm were also obtained from the analysis. copyright (c) 2008 john wiley & sons, ltd.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000261810500009
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4762]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Deng Songwen,Qi Hongji,Shao JD. Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity[J]. surf. interface anal.,2008,40(12):1562, 1565.
APA	Deng Songwen,Qi Hongji,&邵建达.(2008).Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity.surf. interface anal.,40(12),1562.
MLA	Deng Songwen,et al."Study on the layer structure of W/C multilayers deposited by magnetron sputtering using x-ray reflectivity".surf. interface anal. 40.12(2008):1562.