Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Y₂O₃ stabilized ZrO₂ thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses
	Xiao Qi-Ling ; Xu Cheng ; Shao SY(邵淑英) ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	vacuum
	2008
卷号	83 期号:2 页码:366
关键词	YSZ thin films Residual stress Electron-beam evaporation Refractive index Structural properties
ISSN号	0042-207x
中文摘要	this paper describes the preparation and the characterization of y2o3 stabilized zro2 thin films produced by electric-beam evaporation method. the optical properties, microstructure, surface morphology and the residual stress of the deposited films were investigated by optical spectroscopy, x-ray diffraction (xrd), scanning probe microscope and optical interferometer. it is shown that the optical transmission spectra of all the ysz thin films are similar with those of zro2 thin film, possessing high transparency in the visible and near-infrared regions. the refractive index of the samples decreases with increasing of y2o3 content. the crystalline structure of pure zro2 films is a mixture of tetragonal phase and monoclinic phase, however, y2o3 stabilized zro2 thin films only exhibit the cubic phase independently of how much the added y2o3 content is. the surface morphology spectrum indicates that all thin films present a crystalline columnar texture with columnar grains perpendicular to the substrate and with a predominantly open microporosity. the residual stress of films transforms tensile from compressive with the increasing of y2o3 molar content, which corresponds to the evolutions of the structure and packing densities. (c) 2008 elsevier ltd. all rights reserved.
学科主题	光学薄膜
收录类别	EI
资助信息	chinese national natural science foundation [10704078]
语种	英语
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4732]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Xiao Qi-Ling,Xu Cheng,Shao SY,et al. Y₂O₃ stabilized ZrO₂ thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses[J]. vacuum,2008,83(2):366, 371.
APA	Xiao Qi-Ling,Xu Cheng,邵淑英,邵建达,&范正修.(2008).Y₂O₃ stabilized ZrO₂ thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses.vacuum,83(2),366.
MLA	Xiao Qi-Ling,et al."Y₂O₃ stabilized ZrO₂ thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses".vacuum 83.2(2008):366.